As a resolution for air pressure control challenges in ultra-low frequency modal testing suspension systems, an incremental PID control algorithm with dead band is applied to achieve high-precision pressure control. We also develop a set of independent hardware and software systems for high-precision pressure control solutions. Taking control system versatility, scalability, reliability, and ot...

This work deals with the kinematic conception and the mechanical design of ultra-high precision robots, which are at present costly to develop, both in time and money. The aim of this paper is thus to introduce a new modular concept of kinematics which allows to significantly reduce the time-to-market and a new double-stage flexure-based pivot. Regarding the modular concept of kinematics, this ...

In this paper a new concept of a liquid-surface-based three-axis inclination sensor for evaluation of angular error motion of a precision linear slide, which is often used in the field of precision engineering such as ultra-precision machine tools, coordinate measuring machines (CMMs) and so on, is proposed. In the liquid-surface-based three-axis inclination sensor, a reference float mounting a...

Ultra high precision positioning and measuring machines have to face the demand for increasing moving and measuring volumes while reaching accuracy in the nanometer range. For three dimensional measuring systems with the required accuracy a setup of three fixed laser interferometers and a moving mirror with three planes are in use in most cases. The mirror carries the measuring object relativel...

The major physics motivation to construct the International Linear Collider (ILC) is summarized. The prospects for precision measurements of Higgs boson properties and Standard-Model processes as well as new physics scenarios beyond the Standard Model are given. Finally the concepts for an ultra-high-precision detector and R&D towards it are described.