A chip-size vertically aligned nanowire (NW) resonator arrays (VNRs) device has been fabricated with simple one-step lithography process by using grown self-assembled zinc oxide (ZnO) NW arrays. VNR has cantilever diameter of 50 nm, which breakthroughs smallest resonator record (>100 nm) functioning in atmosphere. A new atomic displacement sensing method by using atomic force microscopy is deve...

Horizontally assembled trapezoidal piezoelectric cantilevers driven by magnetic coupling were fabricated for rotational energy harvester applications. A dodecagonal rigid frame with an attached array of six served as a stator electrical power generation. rotor disk permanent magnets (PMs) interacted magnetically the counterpart cantilever’s tip-mass PMs motion. Each cantilever beam was designed...

We investigate nano scanning in tapping mode atomic force microscopy (AFM) under quality (Q) control via numerical simulations performed in SIMULINK. We focus on the simulation of the whole scan process rather than the simulation of cantilever dynamics and the force interactions between the probe tip and the surface alone, as in most of the earlier numerical studies. This enables us to quantify...

This paper chronicles the research in the laboratory of the author at the IBM Research Division during the 1984-1994 time frame that significantly contributed to the development of the scanning probe microscopy technology and its applications. Several key technologies that are now considered commonplace in SPM were developed during that time. These include the vibrating probe AFM (also called A...

Integrated sensors are essential for scanning probe microscopy (SPM) based systems that employ arrays of microcantilevers for high throughput. Common integrated sensors, such as piezoresistive, piezoelectric, capacitive and thermoelectric sensors, suffer from low bandwidth and/or low resolution. In this paper, a novel magnetoresistive-sensor-based scanning probe microscopy (MR-SPM) technique is...

Single carbon nanofibers (CNFs) grown on the tips of scanning probe microscopy (SPM) cantilevers by Arþ irradiation attract much attention, because of their potential in the batch fabrication of CNF probes. Here, we first revealed their mechanical characteristics. An excellent flexibility of CNF probes was confirmed by hard-contact examination (force-curve measurement) in which the cantilever w...

Atomic force microscopy (AFM) represents an important instrument for measuring mechanical properties of biological materials ranging from single molecules to normal or malignant cells. AFM provides a 3D profile of the surface on a nanoscale, by measuring forces between a sharp probe (<10 nm), supported on a flexible cantilever, and surface at very short distance (0.2-10 nm probe-sample separati...

We report on a new type of micromachined probe card which utilizes fritting process to make contact to Al or Cu pads with low contact force smaller than 10 mN. Microcantilevers contacting the pad surface with buckling deformation and can keep uniform contact force were designed and fabricated. Mechanical properties of the micro-cantilever was measured and a good agreement with theoretical buckl...

Avoiding collision of nano-particles during manipulation operations and selecting the best route and lowest Atomic Force Microscopy (AFM) movement are major concerns in the area of nano-space. To apply the lowest force on the cantilever from fluid environment forces, we try to minimize AFM movements. Our proposed method calculates the optimum routing for AFM probe movement for nano-particles tr...

We have developed a self-assembled fluorescent cluster comprising a seminaphthorhodafluor (SNARF) derivative protected by a photoremovable o-nitrobenzyl group. Prior to UV irradiation, a colorless and nonfluorescent cluster was spontaneously assembled in aqueous solution. After UV irradiation, the self-assembled cluster remained intact and showed a large enhancement in pH-responsive fluorescenc...