This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope tructure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low echanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The ...

Nuclear microprobe at 2 MV Tandetron accelerator of Jozef Stefan Institute (JSI) was constructed in the year 2000 with the support of IAEA Technical Cooperation Project SLO/1/004. The measuring station is equipped with instrumentation for micro-Proton-Induced-X-ray-Emission (micro-PIXE), micro-Elastic Recoil Detection Analysis (micro-ERDA), micro-Nuclear Reaction Analysis (micro-NRA), Proton Be...

We have studied the transverse and axial equilibrium positions of dielectric micro-spheres trapped in a single-beam gradient optical trap and exposed to an increasing fluid flow transverse to the trapping beam axis. It is demonstrated that the axial equilibrium position of a trapped micro-sphere is a function of its transverse position in the trapping beam. Moreover, although the applied drag-f...

Laser shaping was introduced to maskless projection soft lithography by using digital micro-mirror device (DMD). The predesigned intensity pattern was imprinted onto the DMD and the input laser beam with a Gaussian or quasi-Gaussian distribution will carry the pattern on DMD to etch the resin. It provides a method of precise control of laser beam shapes and photon-induced curing behavior of res...

Energy harvester is a self-generating energy source which is able to run small scale electronic devices. It largely reduces the dependency on external power source. This paper represents the utilization of micro cantilever beam to develop a vibration based electromechanical systems (MEMS) piezoelectric energy harvester system. The proposed micro cantilever part has been developed by finite elem...

With the rapid development of modern physics, atomic gyroscopes have been demonstrated in recent years. There are two types of atomic gyroscope. The Atomic Interferometer Gyroscope (AIG), which utilizes the atomic interferometer to sense rotation, is an ultra-high precision gyroscope; and the Atomic Spin Gyroscope (ASG), which utilizes atomic spin to sense rotation, features high precision, com...

In the traditional laser beam quality measurement, the lens transform method is used to obtain the information of the multi spot, and can only evaluate the beam quality of a continuous or high repetition rate laser, the evaluation speed is slow and the real-time performance is poor. A micro lens array method is proposed, which samples the laser spot only once and obtains all the spot informatio...