Run-to Run (RtR) control plays an important role in semiconductor manufacturing. In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoid approximation are compared with other RtR controllers by simulation according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as process drifts, process shif...

Process control is widely discussed in the manufacturing process, especially semiconductor manufacturing. Due to unavoidable disturbances manufacturing, different process controllers are proposed realize variation reduction. Since Reinforcement Learning (RL) has shown great advantages learning actions from interactions with a dynamic system, we introduce RL methods for and propose new controlle...

1. introduction mountains are the main sources of turbulence and change in the shape of atmospheric flows, and they can cause airflow upward as well as clouds formation and rain through productive mechanisms such as upslope condensation and convection. they also have an important effect on regional and world precipitation turbulence (banta, 1990; barros & lettenmaier, 1994), and can cause sever...

Advanced Micro Devices Exxon-Mobil Department of Chemical Engineering Austin, TX 78741 Baton Rouge, LA 70806 University of Texas at Austin U.S.A. U.S.A. Austin, TX 78712-1062 U.S.A. Abstract In the manufacture of semiconductor products, overlay is one of the most critical design specifications. Overlay is the position of a pattern relative to underlying layers, and overlay control largely deter...

Run-to-run control is a technique that exploits the repetitive nature of processes to iteratively adjust the inputs and drive the run-end outputs to their reference values. It can be used to control both static and finite-time dynamic systems. Although the run-end outputs of dynamic systems result from the integration of process dynamics during the run, the relationship between the input parame...

BACKGROUND This article provides a clinical update using a novel run-to-run algorithm to optimize prandial insulin dosing based on sparse glucose measurements from the previous day's meals. The objective was to use a refined run-to-run algorithm to calculate prandial insulin-to-carbohydrate ratios (I:CHO) for meals of variable carbohydrate content in subjects with type 1 diabetes (T1DM). METH...