We report the capacitive spring softening effect observed in single-walled carbon nanotube (SWNT) nanoelectromechanical (NEM) resonators. The nanotube resonators adopt a dual-gate configuration with both bottom-gate and end-gate capable of tuning the resonance frequency through capacitive coupling. Interestingly, downward resonance frequency shifting is observed with increasing end-gate voltage...

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor designed and built for a humiditydependent monolithic capacitor developed at Budapest University of Technology and Economics. The second case presents the poss...

— This paper proposes a new circuit for capacitive sensing based on Dickson's charge pump. The proposed touch sensing circuit includes three stages of NMOS diodes and capacitors for charge transfer. The proposed circuit which has a simplified capacitive touch sensor model has been analyzed and simulated by Spectre using Magna EDMOS technology. Looking from the simulation results, the proposed c...

Capacitive technologies play an increasingly important role in the fields of industrial and automotive sensors. The noncontact working principle, on the one hand, is the main advantage of this technology; on the other hand, the sensor is thus sensitive to electromagnetic disturbances. This paper describes methods to successfully develop capacitive sensors, which can reliably be operated in hars...

As microelectronics device feature sizes continue to shrink and wafers continue to increase in size, it is necessary to have tighter tolerances during the fabrication process to maintain high yields. Feedback control has, therefore, become an important issue in plasma processing equipment design. Comprehensive plasma equipment models linked to control algorithms would greatly aid in the investi...

R. Oppelt, M. Vester Corporate Technology, Siemens AG, Erlangen, Germany, Medical Solutions, Siemens AG, Erlangen, Germany Introduction: MRI preamplifiers need to meet a number of technical requirements that are not easily to be achieved simultaneously. Major challenges are a low noise figure (e.g. <= 0.5 dB), a stable gain and a high dynamic range. In addition, the small signal input impedance...

A high accuracy switched capacitor, triple slope digital converter suitable for differential capacitive sensors is presented. The proposed technique accepts differential capacitive sensors possessing either linear or inverse characteristics and provides a linear capacitance to digital conversion. The output is dependent only on a pair of d.c. reference voltages and the clock frequency. Detailed...

The pulse width modulation inverter is widely applied in independent PV renewable generation applications and uninterruptible power supplies. Many control schemes are investigated for the feeding non-linear loads, aiming to achieve desired performance. However, model currently proposed mostly based on a linear load, which not suitable condition with load. In this paper, uncontrolled diode recti...