<p>Cleanroom parameters such as temperature, relative humidity and particle count are vital in maintaining cleanliness. People machines working inside the cleanroom main contributors for sudden changes of separameters. Measurements monitoring these therefore necessary to reduce rejects downtime production micro-electro-mechanical systems (MEMS). This paper presents a method developmentof ...

This paper examines data from information exchange requirements (IER) using a two-part case study, in which Germany-specific tendering, assignment and invoicing (TAI) was attributed to model for selected elements automatically IER self-developed algorithms, where the object is connected partial services quantity take-off (QTO). A comparison of determined quantities calculating software with cal...