This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures...

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy a...

Forces due to propulsion should approximate forces due to hydrodynamic drag for animals horizontally swimming at a constant speed with negligible buoyancy forces. Propulsive forces should also correlate with energy expenditures associated with locomotion-an important cost of foraging. As such, biologging tags containing accelerometers are being used to generate proxies for animal energy expendi...

In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carr...

Gyroscopes have been proposed as sensors for ambulatory gait analysis and functional electrical stimulation systems. Accurate determination of the Initial Contact of the foot with the floor (IC) and the final contact or Foot Off (FO) on different terrains is important. This paper describes the evaluation of a gyroscope placed on the shank for determination of IC and FO in subjects walking outdo...

Eye or head rotation would influence perceived heading direction if it were coded by cells tuned only to retinal flow patterns that correspond to linear self-movement. We propose a model for heading detection based on motion templates that are also Gaussian-tuned to the amount of rotational flow. Such retinal flow templates allow explicit use of extra-retinal signals to create templates tuned t...

This paper presents a signal processing technique to improve angular rate accuracy of the gyroscope by combining the outputs of an array of MEMS gyroscope. A mathematical model for the accuracy improvement was described and a Kalman filter (KF) was designed to obtain optimal rate estimates. Especially, the rate signal was modeled by a first-order Markov process instead of a random walk to impro...

This paper presents a study of the frequency response and the scale-factor of a tuning fork micro-gyroscope operating at atmospheric pressure in the presence of an interference sense mode by utilizing the approximate transfer function. The optimal demodulation phase (ODP), which is always ignored in vacuum packaged micro-gyroscopes but quite important in gyroscopes operating at atmospheric pres...

This paper presents technology for the suppression of the mechanical coupling errors for an improved decoupled dual-mass micro-gyroscope (DDMG). The improved micro-gyroscope structure decreases the moment arm of the drive decoupled torque, which benefits the suppression of the non-ideal decoupled error. Quadrature correction electrodes are added to eliminate the residual quadrature error. The s...

A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout are...