Research Objectives Our multifaceted research program is aimed at the fundamental and practical development of hybrid micro-electro-mechanical-systems (MEMS) that integrates several elements of chemical selectivity and sensor function. We are developing MEMS sensors that combine chemimechanical transduction, and surface enhanced Raman spectroscopy (SERS) and radiation detection. One of our goal...

A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equation...

Advances in the field of Micro Electro Mechanical Systems (MEMS) and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) hav...

This study analyzes the chaotic behavior of a micromechanical resonator with electrostatic forces on both sides and investigates the control of chaos. A phase portrait, maximum Lyapunov exponent and bifurcation diagram are used to find the chaotic dynamics of this micro-electro-mechanical system (MEMS). To suppress chaotic motion, a robust fuzzy sliding mode controller (FSMC) is designed to tur...

Catalytic combustion is a promising technique for producing thermal energy in MEMS(Micro Electro-Mechanical Systems) scale electrical power generators. To examine the feasibility and possible benefits of catalytic combustion in MEMS-scale channels, catalytic reactions in small diameter (1 mm) flow reactor tubes at low Reynolds numbers are simulated by using the commercial fluid dynamics code FL...

Micro-Electro-Mechanical System (MEMS) is one of the few commercial platforms for building optical switches. 2D MEMS L-switching matrix has been introduced recently to double the sizes of 2D MEMS crossbar switches. The sizes of switches are mainly limited by the Gaussian signal loss associated path difference. Though the design of L-switching matrix improves system scalability but it suffers in...

The miniaturization and development of complex Micro Electro Mechanical Systems (MEMS) led to a need for an increase in performance of such systems in terms of displacement range, accuracy, velocity etc. There is a huge potential of using them as tools in nanonoscience such as high-density probe memory applications, scanning probe microscopy (e.g. nanolithography, prototyping of nanostructures)...

In this paper, design and fabrication of an actuated parallel-plate mirror based on a 3D-printer is described. The mirror and electrode layers are fabricated separately and assembled thereafter. The alignment is performed by dowel pin-hole pairs fabricated on the respective layers. The electrodes are formed on the surface of the electrode layer by Au ion sputtering using a suitable mask, which ...

MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and mechanical components in the scale of microns. Due to its small size, low cost, low power consumption and high efficiency, MEMS technology has been widely used in many fields. In this paper, a novel comb-driven, differential capacitance sensing MEMS vibratory gyroscope based on glass-silicon-glass...

In the last few years several types of MEMS-based spectrometer systems emerged, mainly addressing the NIR spectral range. The presented MEMS-based sensor prototype operates in the mid-IR range between 2200 cm and 2500 cm. The main element is a blazed micro-electro-mechanical reflective grating device with an aperture of 3x3 mm2. The optical setup of the sensor corresponds to a Czerny-Turner typ...