Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy a...

The diffusion of micro electro-mechanical systems (MEMS) technology applied to navigation systems is rapidly increasing, but currently, there is a lack of knowledge about the reliability of this typology of devices, representing a serious limitation to their use in aerospace vehicles and other fields with medium and high requirements. In this paper, a reliability testing procedure for inertial ...

We review concurrent multiscale simulations of dynamic and temperature-dependent processes found in nanomechanical systems coupled to larger scale surroundings. We focus on the behavior of sub-micron MicroElectro-Mechanical Systems (MEMS), especially microresonators. These systems are often called NEMS, for Nano-Electro-Mechanical Systems. The coupling of length scales methodology we have devel...

Fabrication imperfections strongly influence the functioning of Micro-Electro-Mechanical Systems (MEMS) if not taken into account during design process. They must be indeed identified or precisely predicted to guarantee a proper compensation calibration phase directly in operation. In this work, we propose an efficient approach for identification geometric uncertainties MEMS, exploiting asympto...

-Barometer is a well-organized tool for determining atmospheric pressure. The altimeter is a tool which calculates the vertical distance in accordance with a reference level. The barometric altimeter, computes the altitude according to the atmospheric pressure. Accuracy and size are the major issues in altimetry. On the other hand the present day altimeters employing conventional pressure senso...

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

A case-based reasoning (CBR) knowledge base has been incorporated into a Micro-Electro-Mechanical Systems (MEMS) design tool that uses a multi-objective genetic algorithm (MOGA) to synthesize and optimize conceptual designs. CBR utilizes previously successful MEMS designs and sub-assemblies as building blocks stored in an indexed case library, which serves as the knowledge base for the synthesi...

This paper describes the design, operation, and test results of a miniature, low cost integrated GPS/inertial navigation system that uses commercial off-the-shelf Micro-Electro-Mechanical System (MEMS) accelerometers and gyroscopes. The MEMS inertial measurement unit (IMU) is packaged in a small size and provides the raw IMU data through a serial interface to a processor board where the inertia...

Cost and space constraints are currently driving manufacturers of Mobile Mapping Systems (MMS) and location based services to investigate and develop next generation of low cost and small size navigation systems to meet the fast growing mobile mapping and location services market demands. Advances in Micro-Electro-Mechanical Systems (MEMS) technology have shown promising light towards the devel...

With the rapid development of Micro-electro-mechanical Systems (MEMS) fabrication technologies, many microelectrodes with various structures and functions have been designed and fabricated for applications in biomedical research, diagnosis and treatment through electrical stimulation and electrophysiological signal recording. The flexible MEMS microelectrodes exhibit excellent characteristics i...