 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

In this paper, we study the behaviour of a microcantilever beam under electrostatic actuation using finite difference method. This problem has a lot of applications in MEMS based devices like accelerometers, switches and others. In this paper, we formulated the problem of a cantilever beam with proof mass at its end and carried out the finite difference solution. we studied the effects of lengt...

An overview of the current state of the art in scanning micromirror technology for switching, imaging, and beam steering applications is presented. The requirements that drive the design and fabrication technology are covered. Electrostatic, electromagnetic, and magnetic actuation techniques are discussed as well as the motivation toward combdrive configurations from parallel plate configuratio...

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An optical fiber with nano-electromechanical functionality is presented. The fiber exhibits a suspended dual-core structure that allows for control of the optical properties via nanometer-range mechanical movements. We investigate electrostatic actuation achieved by applying a voltage to specially designed electrodes integrated in the cladding. Numerical and analytical calculations are preforme...

We developed an 8.4-inch electrostatic-tactile touch display using a segmented-electrode array (30×20) as both tactile pixels and sensors. Each pixel can be excited independently so that the allows presenting real localized textures in any shape. A driving scheme which strength is independent of grounding state human body by employing two-phased actuation was also proposed demonstrated. Further...

the electrohydrodynamic (EHD) flow in a relatively wide electrostatic precipitator (ESP) (width:height = 2) is 2-or 3-dimensional (3D). The previous our measurements of 3D time-averaged flow velocity fields suggested that the flow in the ESP duct centre is almost 2-dimensional. In this paper we present both the 3D instantaneous and time-averaged flow velocity fields in a relatively wide ESP (wi...