This paper describes a comprehensive nonlinear multiphysics model based on the Euler-Bernoulli beam equation that remains valid up to large displacements in the case of electrostatically actuated Mathieu resonators. This purely analytical model takes into account the fringing field effects and is used to track the periodic motions of the sensing parts in resonant microgyroscopes. Several parame...

Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlinearity cancellation is demonstrated with an electrostatically-actuated, piezoresistively-transduced nanomechanical resonator. We prove experimentally how the combination of both the third-order nonlinearity cancellation and simultaneous resonances can be used to linearly drive a nanocantilever up to ...

The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100m length, 3m width, and 11m thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstr...

MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...

We have developed a novel wafer-scale single-crystalline silicon micromirror bonding process to fabricate optically flat micromirrors on polysilicon surface-micromachined 2D scanners. The electrostatically actuated 2D scanner has a mirror area of 450 jtm x 450 tm and an optical scan angle of Compared to micromirrors made with a standard polysilicon surface-micromachining process, the radius of ...

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

ABSTRACT The important practical and realistic design issues of an electrostatic actuator/positioner with full-gap travel are discussed. Analytic expressions and numerical simulations show that parasitic capacitances, and non-uniform deformation in two and three dimensions influence the range of travel of an electrostatic positioner stabilized by the addition of a series capacitor. The effects ...

A method for MEMS macromodel development is presented which is based on a physical device description to obtain mathematical relations for the device operation. Since design and technology parameters are input parameters of the resulting model, this method is well suited for design studies. As a benchmark problem, we refer to the macromodel of a micropump driven by an electrostatically actuated...

Presented herein is an analytical approach based on homotopy analysis method (HAM) used to deal with the seventh-order Duffing type problem with high-order nonlinearity. Such a problem corresponds to the large-amplitude vibration of an electrostatically actuated microbeam. Unlike tradition HAM, the convergence-control auxiliary parameters ( ) i i 1,2 m = ħ ⋯ are introduced in the present approx...

By introducing the second order Krylov subspace, a method for the reduction of second order systems is proposed leading to a reduced system of the same structure. This generalization of Krylov subspace involves two matrices and some starting vectors and the reduced order model is found by applying a projection directly to the second order model without any conversion to state space. A numerical...