The term Micro Air Vehicles (MAVs) is used for a new type of remotely controlled, semi-autonomous or autonomous aircraft that is significantly smaller than conventional aircrafts. To apply Micro Electro Mechanical Systems (MEMS) inertial sensors for the Guidance, Navigation and Control (GNC) of Micro Air Vehicle (MAV) is an extremely challenging area. The major components of the control system ...

Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a ...

Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, an electrothermal bimorph MEMS mirror that does not generate overshoot in step response, even operating in air, is reported. This is achieved by pro...

As the field of micro-electro-mechanical systems (MEMS) has diversified, a growing number of applications are limited by the current planar technology available for fabrication. Gray-scale technology offers a method of fabricating 3-D structures in MEMS utilizing a single lithography step. Before gray-scale technology can be accepted as a universal/standard fabrication technique, methods for co...

By introducing smart materials in micro systems technologies, novel smart microactuators and sensors are currently being developed, e.g., for mobile, wearable, and implantable MEMS (Micro-electro-mechanical-system) devices. Magnetic shape memory alloys (MSMAs) are a promising material system as they show multiple coupling effects as well as large, abrupt changes in their physical properties, e....

Carcinomas are the most commonly diagnosed cancers originating in the skin, lungs, breasts, pancreas, and other organs and glands. In most of the cases, the microenvironment within the tissue changes with the progression of disease. A key challenge is to develop a device capable of providing quantitative indicators in diagnosing cancer by measuring alteration in electrical and mechanical proper...

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to development of small-scale smart sensing devices improved sensitivity a lower cost fabrication and relatively small power consumption. This article aims provide overview recent work carried out on methodologies adopted dev...

Micro-electro-mechanical systems (MEMS) represent a very important class of systems having applications ranging from small embedded sensors and actuators, passive components in RF and microwave fields, and micro-mirrors in the optical range. The importance of MEMS stems from their many advantages, among which are, their small compact size amendable to integration with other components, low loss...

This paper presents Artificial Neural Network (ANN) implementation for Mechanical modeling of Radio Frequency Micro Electro Mechanical System (RF MEMS) lateral double beam switch. We propose an efficient approach based on ANN for analyzing the static and dynamic characteristics of RF MEMS lateral switch by calculating its characteristics parameters. ANN model were trained with five learning alg...

We present ultra low-cycle fatigue experiments of axisymmetric nano-crystalline gold films of nano-thickness deformed by a spherical indenter using a recently developed freestanding membrane test. Freestanding membranes of gold were centrally deflected using a spherical indenter attached to a MEMS load cell. Fabrication of the films for these experiments yielded films 100 nm thick and 500 μm in...