In this paper we study the use of pseudorandom test techniques for linear and nonlinear devices, in particular Micro Electro Mechanical Systems (MEMS). These test techniques lead to practical BuiltIn-Self-Test techniques (BIST). We will first present the pseudorandom test technique for Linear Time Invariant (LTI) systems. Next, we will illustrate and evaluate the application of these techniques...

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to development of small-scale smart sensing devices improved sensitivity a lower cost fabrication and relatively small power consumption. This article aims provide overview recent work carried out on methodologies adopted dev...

We report a new approach for efficient computation of capacitance in multiconductor systems embedded in homogeneous or multiple dielectric media. The technique employs exponential expansion of the Green's function for evaluation of the three-dimensional potential and its gradient, enabling rapid and accurate extraction of interconnect capacitance in VLSI and large-area amorphous silicon electro...

INTRODUCTION Because they have higher isolation and lower insertion loss compared to semiconductor switches, the last decade has seen the development of several types of MEMS (Micro Electro Mechanical Systems) switch. Many of these are electrostatically actuated and so need high drive voltages, limiting the initial gap between the contact points to a few micrometers [1-3]. Such small gaps betwe...

We present in this paper the development of a high-resolution projection micro-stereolithography (P SL) process by using the Digital Micromirror Device (DMDTM, Texas Instruments) as a dynamic mask. This unique technology provides a parallel fabrication of complex three-dimensional (3D) microstructures used for micro electro-mechanical systems (MEMS). Based on the understanding of underlying mec...

This work presents a novel method based on the micromachined acoustic wave sensor for evaluating silicon membrane thickness. Like pressure sensors, accelerometers, micro flow sensors and micropumps, many micro-electro-mechanical systems (MEMS) devices require that silicon membrane thickness be known exactly. Precisely controlling silicon membrane thickness during wet etching is important, becau...

The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end of the last century, a fertile ground for a new breed of technological and scientific achievements. The weightlessness of light has been identified very early as a key advantage for micro-actuator application, giving rise to optical free-space MEMS devices. In parallel to these developments, the past 20 years ...

Cost and space constraints are currently driving manufacturers of Mobile Mapping Systems (MMS) and location based services to investigate and develop next generation of low cost and small size navigation systems to meet the fast growing mobile mapping and location services market demands. Advances in Micro-Electro-Mechanical Systems (MEMS) technology have shown promising light towards the devel...

A distributed algorithm is proposed in order to control block motion of a reconfigurable micro-electro-mechanical modular surface. The modular surface is designed to convey fragile and tiny micro-parts. The distributed algorithm solves a discrete trajectory optimization problem. In particular, the algorithm computes the shortest path between two points of the modular surface using a strategy ba...

In this work, we study the local wellposedness of solution to a nonlinear elliptic-dispersive coupled system which serves as model for Micro-Electro-Mechanical System (MEMS). A simple electrostatically actuated MEMS capacitor device consists two parallel plates separated by gas-filled thin gap. The modelling combines linear elliptic equation gas pressure with semilinear dispersive gap width. We...