Efforts to adapt and extend graphic arts printing techniques for demanding device applications in electronics, biotechnology and microelectromechanical systems have grown rapidly in recent years. Here, we describe the use of electrohydrodynamically induced fluid flows through fine microcapillary nozzles for jet printing of patterns and functional devices with submicrometre resolution. Key aspec...

This paper shows, for the first time, a complete magnetic field sensing system including a Lorentz-force sensor operating at a frequency slightly lower than the mechanical resonance coupled to an integrated circuit for sensing and driving the device. Working out of resonance, the trade-off between maximum sensing bandwidth and minimum detectable magnetic field is overwhelmed, allowing to improv...

A solid body undergoing oscillatory motion in a fluid generates an oscillating flow. Oscillating flows in Newtonian fluids were first treated by G.G. Stokes in 1851. Since then, this problem has attracted much attention, mostly due to its technological significance. Recent advances in micro- and nanotechnology require that this problem be revisited: miniaturized mechanical resonators with linea...

Tunable coupling regimes of a silicon microdisk resonator controlled by MEMS (microelectromechanical system) actuation are demonstrated for the first time. By varying the gap spacing between the waveguide and the disk, this microresonator can dynamically operate in either under-, ciritcal or over-coupling regime. The waveguide transmittance is suppressed by 30 dB in critical coupling, and the q...

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed...

A dry sacrificial layer process is presented in which microstructures fabricated on UV-transparent substrates are released by excimer laser ablation of a polymer sacrificial material using laser light incident from the reverse side of the substrate. We investigate the application of this technique to the batch assembly of hybrid microelectromechanical systems (MEMS) built from parts fabricated ...

S ince the mid-1980s, minimally invasive surgery has evolved with the creation of such devices as 3-mm instruments and miniature probes for percutaneous therapies. However, one must ask, “When does it end? How small is too small?” This fundamental question is the foundation of microelectromechanical systems or MEMS technology. Although images of the 1966 film Fantastic Voyage, in which a group ...

Microelectromechanical ~MEMS! gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscop...

Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the "Internet of Things," will require a suite of MEMS materials and properties that are not currently available. We report on the s...