In this paper, a fine particle manipulation system using a piezoresistive microcantilever, which is normally utilized in Atomic Force Microscopy, as the manipulator and force sensor, and a top-view Optical Microscope (OM) as the vision sensor is proposed. Modeling and control of the interaction forces among the manipulator, particle and surface have been realized for moving particles with sizes...

We report the use of the photothermal actuation for the self-excitation of a selected vibration mode of a microcantilever in liquid. The gain of the positive feedback loop is adjusted in order to obtain a negative effective damping. In this regime, the amplitude noise is squeezed due to the nonlinear saturation of the system and the phase noise is largely reduced. The microcantilever vibration ...

This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantilever biosensors, both the deflection and the resonant frequency of the cantilever should be increase...

Sensitive biosensors for detection of triglyceride concentration are important. In this paper we report on two types of silicon based triglyceride sensors: an electrolyte-insulator-semiconductor capacitor (EISCAP) which is a potentiometric device and a polysilicon microcantilever. The detection principle for both sensors is based on the enzymatic hydrolysis of triglyceride though the sensing me...

This paper investigates the effect of electrical contact on the thermal contactstress of a microrelay switch. A three-dimensional elastic-plastic finite element model withcontact elements is used to simulate the contact behavior between the microcantilever beamand the electrode. A model with thermal-electrical coupling and thermal-stress coupling isused in the finite element analysis. The effec...

in this paper the active vibration control of a four-story shear frame instrumented with piezoelectric actuators is presented. the piezoelectric actuators are hosted on the columns in two manners and the produced controlling forces by actuators are considered in the equation of motion. the smart structure modeling and control design is carried out using matlab software in state space form. subs...

a r t i c l e i n f o a b s t r a c t A shunted piezoelectric is a device to suppress vibration consisting of a piezoelectric material and a shunt circuit connecting between two electrodes of the piezoelectric material. The sensitivity of damping performances is analyzed for passive shunted piezoelectrics: a resistive, a series resonant, and a parallel resonant shunted piezoelectric. The parame...

Microcantilevers are key components of many Micro-Electro-Mechanical Systems (MEMS) and Micro-Optical-ElectroMechanical Systems (MOEMS) because slight changes to them physically or chemically lead to changes in mechanical characteristics. An inexpensive dual-fiberoptic microcantilever proximity sensor and model to predict its performance are reported here. Motion of a magnetic-material-coated c...