The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed.

Title of Document: ORIENTATION DEPENDENCE OF THE PIEZOELECTRIC PROPERTIES OF EPITAXIAL FERROELECTRIC THIN FILMS Jun Ouyang, Doctor of Philosophy, 2005 Directed By: Professor Alexander. L. Roytburd Dept. of Materials Science and Engineering There are both intrinsic piezoelectric response and extrinsic piezoelectric response in ferroelectric materials. The intrinsic piezoelectric response is due ...

in this paper, design and construction of a tactile sensor for measuring contact-force is presented. mechanism of measuring contact-force in this tactile sensor is based on impedance changing of piezoelectric crystal and voltage of different points in circuit as a result of applying force on the crystal. by considering a specific point in the circuit and recording the changes of its voltage, ma...

-In this paper, piezoelectric actuation is compared with electrostatic actuation for application in RF-MEMS switches with respect to actuation voltage and technological implementation. The expression for the actuation voltages of electrostatic and piezoelectric actuation are discussed and compared with respect to scaling. Calculation examples show actuation voltages for a cantilever beam of 1μm...

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Piezoelectric loudspeaker is characterized by its very simple constructions, but their radiation performance at low frequency region is poor because their conventional diaphragm is too stiff for large amplitude vibration. This paper proposes three innovative methods for improvement of low frequency radiation performance of piezoelectric direct-radiator loudspeakers by new constructions and mate...