Fabrication of Micro-Electro-Mechanical-Systems (MEMS) requires deposition of films such as SiO2, Si3N4, ZnO, polysilicon, phosphosilicate glass (PSG), Al, Cr-Au, Pt, etc. for use as structural, sacrificial, piezoelectric and conducting material. Deposition of these materials at low temperature is desirable for fabricating sensors/actuators on temperature-sensitive substrates and also for integ...

Damages are created in a sacrificial layer of silicon dioxide by ion implantation to enhance the etch rate of silicon-dioxide in liquid and vapor phase hydrofluoric acid. The etch rate ratio between implanted and unimplanted silicon dioxide is more than 150 in vapor hydrofluoric acid (VHF). This feature is of interest to greatly reduce the underetch of microelectromechanical systems anchors. Ba...

the arithmetic mean roughness, ra, values were determined by scanning electron microscopic technique of different core models (furazolidone, nitrofurantoin and acetyl salicylic acid), coated by hpmc film forming solution containing 10 wt% of various molecular weight pegs. the results showed that both plasticizer molecular weight and core surface free energy could have a significant influence on...

In this paper, we investigate the optimization of tensile strain caused by thermal oxidation in a doubly-clamped silicon nanowire FET to enhance the mobility of its carriers. Spacer technology combined with sacrificial oxidations was used to fabricate ≈ 100 nm wide nanowires. The temperature and the duration of sacrificial wet oxidation are the main parameters that determine the induced strain....

The fabrication of SiC MEMS pressure sensor based on novel vacuum-sealed method is presented in this paper. The sensor was fabricated using surface micromachining. Due to its excellent mechanical properties and high chemical resistance, PECVD (Plasma Enhanced Chemical Vapor Deposition) SiC was chosen as structural material. Polyimide is the sacrificial layer which solve stiction problem in proc...

We investigate the entropic force-elongation behavior of a polymer chain in the presence of the sacrificial bond and hidden length (SBHL) system observed experimentally in many biomaterials. We show that in most cases the SBHL system leads to a significant increase in toughness. However, the presence of a large number of bonds or relatively strong bonds in the SBHL system can reduce the net gai...

conclusions roll stitch technique had superior outcome compared to the modified kessler technique, when performed in the mcpj area. level of evidence: therapeutic (level iii) background proper suturing technique is needed to ensure good outcome in extensor tendon surgery. different techniques have been reported for the repair of extensor tendon injuries at the level of the metacarpophalangeal j...