Electromagnetic radiation ranging in frequency from a few MHz to tens of GHz has been used to volumetrically heat silicon above 1000°C in only a few seconds. Typical power is <1.5 kW. This technique has successfully produced direct Si wafer-to-wafer bonds in only five minutes without the use of any intermediate glue layer. Infrared images indicate void free bonds, and knife-edge tests could not...

This article studies the effect of grinding along crystallographic directions on the surface finish of single-crystal silicon. It also discusses new and=or improved processes for precision machining brittle materials, including silicon. Silicon samples were cut from (100) silicon wafers. These samples were then subjected to grinding along different crystallographic directions under the same exp...

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We describe a simple procedure for photolithographic patterning of streptavidin on silicon substrates. Long wavelength UV (365 nm) light was used to direct the covalent attachment of photoactivatable biotin onto silylated silicon wafers. Fluorescently labeled streptavidin was found to bind only in areas exposed to the light. We used this procedure to selectively pattern streptavidin inside micr...

A simple method for fabricating vertically stacked single-crystal silicon nanowires on standard bulk silicon wafers is presented. The process uses inductively coupled plasma (ICP) etching to create silicon fins with uneven yet controllable vertical profiles. The fins are then thermally oxidized in a self-limiting process, and the narrow regions are completely consumed to create multiple nanowir...

The majority of solar cells produced today are made with crystalline silicon wafers, which are typically manufactured by growing a large piece of silicon and then sawing it into ~200 pm wafers, a process which converts one-half of the high-purity silicon into waste sawdust. To bypass the sawing process, a new method for making high-quality multicrystalline wafers without sawing is under develop...

Abstract Silicon wafer is the main component of silicon-based solar cells which carries around sixty percent cell cost. manufacturing most energy-consumed process compared to other materials, thus, discovering free silicon recourses saves environment and increases sustainable development. This work extracted wafers from end-of-life (EoL) in laboratory were already forgone after those have been ...

A microfluidic analysis system based on photometric measurements is presented. Feasibility of photometric analysis in silicon flow channels has been shown using commercially available reagents and a microspectrometer. Quantitative determination of iron and phosphate in water in the concentration range around the legal limit for drinking water has been carried out as an example. An integrated an...

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