INTRODUCTION AS VLSI (very large scale integration) technology evolves toward ever smaller features and multilayer designs, analysis and control of structures and compositions at the atomic level is becoming increasingly important. In 1998 Hitachi HighTechnologies Corporation released the HD-2000, a STEM (scanning transmission electron microscope) that was very well received for combining the e...

Transmission electron microscope (TEM) images recorded under tilted illumination conditions transfer higher spatial frequencies than axial images. This super resolution information transfer is highly directional in a single image, but can be extended in all directions through the use of complementary beam tilts during exit wave function reconstruction. We have determined the optimal experimenta...

In this paper we explore the desirability of a transmission electron microscope in which the phase of the electron wave can be freely controlled. We discuss different existing methods to manipulate the phase of the electron wave and their limitations. We show how with the help of current techniques the electron wave can already be crafted into specific classes of waves each having their own pec...

Improved resolution made possible by aberration correction has greatly increased the demands on the performance of all parts of high-end electron microscopes. In order to meet these demands, we have designed and built an entirely new scanning transmission electron microscope (STEM). The microscope includes a flexible illumination system that allows the properties of its probe to be changed on-t...

We demonstrate the ability to record a tomographic tilt series containing 3487 images in only 3.5 s by using a direct electron detector in a transmission electron microscope. The electron dose is lower by at least one order of magnitude when compared with that used to record a conventional tilt series of fewer than 100 images in 15-60 minutes and the overall signal-to-noise ratio is greater tha...

The TEM The TEM has a similar optical configuration to an optical microscope. A flood beam of electrons illuminates a thin sample. The electron transmitted through the sample are projected onto a viewing screen or camera for observation (Figure 1). Samples must be thin (around 100 nm) and the beam energies must be high. Electrons may either pass through the sample without being scattered or may...

Needle-shaped atom probe specimens containing a single grain boundary were produced using the focused ion beam (FIB) of a two-beam FIB/SEM (scanning electron microscope) system. The presented specimen preparation approach allows the unprecedented study of a grain boundary which is well characterised in its crystallographic orientation by means of the field ion microscope (FIM) and the tomograph...

Valence electron energy-loss spectroscopy in the scanning transmission electron microscope can provide detailed information on the electronic structure of individual nanostructures. By employing the latest advances in electron optical devices, such as a probe aberration corrector and an electron monochromator, the probe size, spectroscopic resolution, probe current and primary electron energy c...

Diffractive imaging, in which image-forming optics are replaced by an inverse computation using scattered intensity data, could, in principle, realize wavelength-scale resolution in a transmission electron microscope. However, to date all implementations of this approach have suffered from various experimental restrictions. Here we demonstrate a form of diffractive imaging that unshackles the i...