We recently showed that sputter-deposited Zr1-xTaxBy thin films have hexagonal AlB2-type columnar nanostructure in which column boundaries are B-rich for x < 0.2, while Ta-rich ? 0.2. As-deposited layers with 0.2 exhibit higher hardness and, simultaneously, enhanced toughness. Here, we study the mechanical properties of ZrB2.4, Zr0.8Ta0.2B1.8, and Zr0.7Ta0.3B1.5 annealed Ar atmosphere as a func...

Coatings of zirconium compounds are used in a wide variety fields, yet an understanding and descriptions deposition mechanisms scant the public literature. The for metallic zirconium, ZrC, ZrN, ZrO2, ZrB2, silicides discussed based on direct vapor research those where possible or compared to complementary titanium systems when is lacking. Both inorganic organometallic discussed. As class compou...