As microelectronics device feature sizes continue to shrink and wafers continue to increase in size, it is necessary to have tighter tolerances during the fabrication process to maintain high yields. Feedback control has, therefore, become an important issue in plasma processing equipment design. Comprehensive plasma equipment models linked to control algorithms would greatly aid in the investi...

A highly sensitive NEMS capacitive sensor with electrode separation in the order of Debye length is fabricated for label free DNA analysis. The use of nano-scale electrode separation provides better insight in to the target-probe interaction which was not previously attainable with macro or even micro scale devices. As the double layers from both the capacitive electrodes merge together and occ...

In this paper, a CMOS low-noise amplifier (LNA) with a new input matching topology has been proposed, analyzed and measured. The input matching network is designed through the technique of capacitive feedback matching network. The proposed LNA which is implemented in a 0:18-mm1P6M CMOS technology is operated at the frequency of 12.8GHz. It has a gain S21 of 13.2 dB, a noise figure (NF) of 4.57 ...

Abstract A grain moisture detection system is proposed in this paper, which is designed based on capacitive sensor and single chip microcomputer. The working principle of concentric capacitive sensor is introduced and the hardware circuits of system are described in details. The system has an intelligent controller internal, it can collect data, display data and determine whether to alarm when ...

This paper presents a new spherical shaped capacitive sensor device for creating interactive compositions and embodied user experiences inside of a periphonic, 3D sound space. The Somatic Sound project is here presented as a) technological innovative musical instrument, and b) an experiential art installation. One of the main research foci is to explore embodied experiences through moving, inte...

Corn moisture content is the main factor of effecting corn safe transportation and storage, and is also an indispensable measurement part when it is used to feed, food and industry. Due to large particle size, corn will produce large gap during measuring moisture content. Because air has much influence on dielectric constant of the device, moisture content is not precision. In all kinds of corn...