Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy a...

Purpose – The purpose of this paper is to discuss the numerical modelling of 3D structure of micro-electro-mechanical systems (MEMS) accelerometers. The general idea being discussed is the method of levitation force reduction, as the main source of incorrect mathematical model of comb drive structure. Design/methodology/approach – Accelerometers design is a highly interdisciplinary area and, th...

This paper presents Artificial Neural Network (ANN) implementation for Mechanical modeling of Radio Frequency Micro Electro Mechanical System (RF MEMS) lateral double beam switch. We propose an efficient approach based on ANN for analyzing the static and dynamic characteristics of RF MEMS lateral switch by calculating its characteristics parameters. ANN model were trained with five learning alg...

As a result of the unpredictable nature extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for MEMS switch (MEMS-S3). In particular, this must remain stable without any energy input after state transition (i.e., it be bistable). paper, bistable (MEMS-bS3) is design...

This thesis describes novel methods for integration of different, fundamentally important, enabling microtechnologies to realize highly functional opto-electro-mechanical systems. These microtechnologies are i) micro-electro-mechanical systems (MEMS), ii) microoptics, and particularly diffractive optical elements (DOEs), iii) semiconductor lasers realized as vertical-cavity surface-emitting las...

We present ultra low-cycle fatigue experiments of axisymmetric nano-crystalline gold films of nano-thickness deformed by a spherical indenter using a recently developed freestanding membrane test. Freestanding membranes of gold were centrally deflected using a spherical indenter attached to a MEMS load cell. Fabrication of the films for these experiments yielded films 100 nm thick and 500 μm in...

Conventional electro-mechanical inertial sensors are being replaced by MEMS versions which are miniature in size, light weight, cost effective, more reliable and sensitive, low power consuming and VLSI compatible. Although silicon is the most widely used material for MEMS, quartz has some advantage for realizing inertial sensors due to its piezoelectric property. The R&D activities undertaken i...

This study aims to investigate the utilization of Bayesian techniques for calibration micro-electro-mechanical systems (MEMS) accelerometers. These devices have garnered substantial interest in various practical applications and typically require through error-correcting functions. The parameters these functions are determined during a process. However, due sources noise, cannot be with precisi...

Fabrication imperfections strongly influence the functioning of Micro-Electro-Mechanical Systems (MEMS) if not taken into account during design process. They must be indeed identified or precisely predicted to guarantee a proper compensation calibration phase directly in operation. In this work, we propose an efficient approach for identification geometric uncertainties MEMS, exploiting asympto...

In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touchdown whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical divergence of the electric field. In the present work, we propose novel regularized governing equations whose solutions remain finite at touchdown and exhibit addit...