Micro-electro-mechanical-systems (MEMS) inertial measurement unit (IMU) outputs are corrupted by significant sensor errors. The navigation errors of a MEMS-based inertial navigation system will therefore accumulate very quickly over time. This requires aiding from other sensors such as Global Navigation Satellite Systems (GNSS). However, it will still remain a significant challenge in the prese...

This study aims to investigate the utilization of Bayesian techniques for calibration micro-electro-mechanical systems (MEMS) accelerometers. These devices have garnered substantial interest in various practical applications and typically require through error-correcting functions. The parameters these functions are determined during a process. However, due sources noise, cannot be with precisi...

This paper presents the methodology of material parameters’ estimation for dual-phase-lag (DPL) model at nanoscale in modern integration circuit (IC) structures. The analyses and measurements performed were used unique dedicated micro-electro-mechanical system (MEMS) test structure. electric thermal domain this structure was analysed. Finally, silicon dioxide (SiO2) temperature time-lag procedu...

Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper pres...

This talk presents the benefit of buckling in strongly tuning nonlinear MEMS resonators. In particular, shows experimental achieving more than 230% natural frequency drumhead Moreover, experiments demonstrate that switches response between purely stiffening, softening, and stiffening-to-softening nonlinearities. We tune state these by controlling electric voltage temperature Therefore, resonato...

Abstract In this paper, we mainly design two modulation ratios of Al/Ni reactive films, prepare TaN@(Al/Ni) by MEMS (Micro-Electro-Mechanical Systems) technology, and conduct firing experiments using capacitive firing. The experimental results show that the ratio has a large effect on performance bridge action process film can be clearly observed high-speed photography.

With the development of intelligent machine tools, monitoring the vibration by the accelerometer is an important issue. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high resolution, and high bandwidth. A commonly used accelerometer is the lead zirconate titanate (PZT) type; however, integrating it into intelligent ...

This paper describes the design, operation and performance test results of a miniature, low cost integrated GPS/inertial navigation system (INS) designed for use in UAV or UGV guidance systems. The system integrates a miniaturized commercial GPS with a low grade Micro-Electro-Mechanical (MEMS) inertial measurement unit (IMU). The MEMS IMU is a small self-contained package (< 1 cu inch) and incl...