The entire process of calibrating an electromechanical simulator – identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device – is presented. The simulation model for electrostatically-actuated beams is calibrated to a wide range of electrical and optical test st...

The mass-spring model of electrostatically actuated microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) is pervasive in the MEMS and NEMS literature. Nonetheless a rigorous analysis of this model does not exist. Here periodic solutions of the canonical mass-spring model in the viscosity dominated time harmonic regime are studied. Ranges of the dimensionless average app...

We exploit the remarkable low-friction bearing capabilities of multiwalled carbon nanotubes (MWNTs) to realize nanoelectromechanical switches. Our switches consist of two open-ended MWNT segments separated by a nanometer-scale gap. Switching occurs through electrostatically actuated sliding of the inner nanotube shells to close the gap, producing a conducting ON state. For double-walled nanotub...

We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 μm commerci...

We report a nano-electromechanical optoelectronic (NEMO) tunable vertical-cavity surface-emitting laser (VCSEL) with an ultra-thin (145 nm) electrostatically actuated high-index-contrast subwavelength grating (HCG) designed to strongly reflect TE-polarized light. Single mode emission (SMSR >45 dB) and continuous wavelength tuning (approximately 4 nm) were obtained at room temperature with outpu...

The main contribution of this paper is the development of a linearized model for describing the dynamic hysteresis behaviors of piezoelectrically actuated fast tool servo (FTS). A linearized hysteresis force model is proposed and mathematically described by a fractional order differential equation. Combining the dynamic modeling of the FTS mechanism, a linearized fractional order dynamic hyster...

This study is devoted to providing predictions of the pull-in parameters (pull-in voltage and pull-in displacement) of electro-statically actuated micro-beams based on a continuous model using Genetic Algorithm (GA) technique. A phenomenon in which the actuated electrode comes in direct contact with the fixed electrode due to the electrostatic force is called pull-in instability. Accurate deter...