This paper presents our technological approach for Externally Modulated Lasers (EMLs), based on Semi-Insulating Buried Heterostructure (SIBH) waveguide. We use Gas Source Molecular Beam Epitaxy (GSMBE) to grow the Phosphorus-based multi-quantum wells both laser and modulator sections with butt-joint integration. The same GSMBE grows p-doped InP claddings low-diffusion Be dopant, leading an accu...