MEMS Oscillator design for high frequency application is approached in this project and its gain, noise and power are analyzed. The CMOS Micro Electro Mechanical System resonator structure is modeled using its RLC equivalent circuit where all passive components are extracted by COMSOL Mutiphysics tool. MEMS based oscillator requires to be combined with amplifier circuits to improve the performa...

The processing techniques for micro and nano devices fabrication can be divided into two groups. On one hand, there are the techniques that allow the modification of a given substrate, e.g. ionic implantation, metallization, etching and thermal processes to either grow or deposit insulator layers. On the other hand, there are the processes that allow a pattern transfer of the designs onto the s...

Experimental validation of a distortion removal technique for multi-chip free-space optical shuffle interconnections is presented. The free-space fabric links dense two-dimensional arrays of vertical cavity surface emitting laser(s) (VCSEL)(s) and detectors and must achieve full field registration on the order of 10 microns across the entire array. The new hybrid micro-macro optical concept rea...

We report a novel surface-micromachined micro-optical bench (MOB) technology which enables us to monolithically integrate "flipped-up" free-space optical elements with micro-positioners and micro-actuators. This technology allows complete optical systems be implemented on a single Si chip using IC-like microfabrication processes. We have, for the first time, successfully fabricated micro-Fresne...

To solve the long object problem, an exact and efficient algorithm has been recently developed by Katsevich. While the Katsevich algorithm only works with standard helical cone-beam scanning, there is an important need for nonstandard spiral cone-beam scanning. Specifically, we need a scanning spiral of variable radius for our newly proposed electron-beam CT/micro-CT prototype. In this paper, f...

In this paper, we propose a new experimental method to investigate the fatigue crack growth mechanisms of submicron-scale cracks by using freestanding single edge notched micro-beams that are fabricated on the surfaces of conventional bending specimens with the focused ion beam technique. Three dimensional FEM simulations in conjugate with LEFM fracture analysis were carried out to correlate th...

This paper presents a new research study on the platform fabrication of fluorescence bio-detection chip with an optical fiber transmission. Anisotropic wet etching on (100) silicon wafers to fabrication V-groove for optical fiber alignment and micro-mirror were included. Combing with anodic bonding technique to adhere glass, silicon structure and optical fiber for a fluorescence excitation plat...

The effect of geometry on thermoelastic damping in micro-beam resonators is evaluated using an eigenvalue formulation and a customized finite element method. The vented clamped–clamped (CC) and clamped-free (CF) beams with square-shaped vents along their centerlines, are both analyzed by the finite element method. The quality factor and the resonant frequency are obtained as functions of variou...

Laser micro bending process of Ti6Al4V square bar are carried out using a 3D thermo-mechanical finite element analytical model (FEM). The transient temperature fields, displacement fields, stress fields and strain fields are obtained and analyzed. The results show that the bending angel during laser micro bending process is in good agreement with experimental measurements. The effects of proces...

C. Griffin a) , E. Gu, H.W. Choi, C. W. Jeon, J.M. Girkin, and M.D. Dawson Institute of Photonics, University of Strathclyde, 106 Rottenrow, Glasgow G4 0NW, United Kingdom G. McConnell, Centre for Biophotonics, University of Strathclyde 27 Taylor Street, Glasgow G4 0NR, United Kingdom Abstract The recent development of high-density, two-dimensional arrays of micrometer-sized InGaN/GaN light-emi...