This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyr...

Micro- and nanocantilevers are employed in atomic force microscopy (AFM) and in micro- and nanoelectromechanical systems (MEMS and NEMS) as sensing elements. They enable nanomechanical measurements, are essential for the characterization of nanomaterials, and form an integral part of many nanoscale devices. Despite the fact that numerous methods described in the literature can be applied to det...

Slip strengths of hai basal, hai prism, and hc+ai pyramidal systems in commercially pure zirconium have been determined using micro-cantilever testing. A range of single crystal cantilevers 0.5 lm to 10 lm wide, oriented for single slip were prepared using focused ion beam (FIB) machining and subsequently deflected using a nanoindenter. The critical resolved shear stress (scrss) was found by fi...

The performance of a chaotic micro resonator is improved by redesigning a quadratic controller reported in a previous study. The chaotic micro resonator is composed of an electrostatic actuator and a voltage regulator (controller). The actuator is made of cantilever beam electrode above a fixed electrode. The actuator voltage, and consequently the electrostatic force magnitude, is controlled to...