Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange...

For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These t...

This paper proposes an adaptive observer-based scheme to control fractional-order chaotic micro-electro-mechanical-systems (MEMS). The model of a system exhibits the dynamic behaviour physical more accurately than similar integer-order one. An considering unknown parameters is presented for micro-electro-mechanical-system. To handle existence parameters, law consists both estimated and also sta...

This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where mechanical to causes it produce voltage, this voltage is used actuate Micro-Electro-Mechanical-system (MEMS) switch. For first time, we present fabrication process Triboelectric-Nano-Generator (TENG) with technology. The MEMS-TENG has suspended 1.5 mm × pl...

A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equation...

Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage development new generation MEMS-based is design optimization stage. However, device processes are developed a laboratory by empirical approaches. This causes time loss creates an unnecessary waste resources. ...

The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 ...

In this paper, we present three hierarchical multiscale architectures that are interconnected electrooptically at micro-scale level and via spin waves at nanoscale level. These architectures are derived from the Optical Reconfigurable Mesh (ORM), which is a MEMS architecture that supports several types of electrical and optical routings. The first multi-scale architecture presented here is a st...

Catalytic combustion is a promising technique for producing thermal energy in MEMS(Micro Electro-Mechanical Systems) scale electrical power generators. To examine the feasibility and possible benefits of catalytic combustion in MEMS-scale channels, catalytic reactions in small diameter (1 mm) flow reactor tubes at low Reynolds numbers are simulated by using the commercial fluid dynamics code FL...

Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. However, high friction in these systems is a problem which limits the development of MEMS devices in which sliding contacts are involved. The aim of this research is to evaluate the effect of boundary slip on the hydrodynamic friction in a low load lubricated MEMS, in particu...