This paper focuses on the design and fabrication of the silicon neural probe with two improvements: the design of process for improvement in fabrication yield and the integration of ground layer for reduction of electromagnetic noise. First, we have found that fabrication yield is determined by wet-etch step for bulk micromachining on back side of wafer. In order to improve fabrication yield, a...

Micro strip transmission lines are widely used, and for good reason. They are broadband in Trea hertz frequency. They provide circuits that are compact and light in weight. They are generally economical to produce since they are readily adaptable to hybrid and monolithic integrated circuit (IC) fabrication technologies at Tera Hertz frequencies. To better appreciate printed transmission lines a...

Three-dimensional (3D) microprinting is a computerized fabrication technique that can produce porous objects with highly complicated pore micro-architecture using data generated by computer aided design (CAD) or other imaging modalities [1]. This technique has been used for fabrication of porous biodegradable polymeric scaffolds that are intended, by design, to have reproducible and well-define...

To allow testing of micro-scale aerodynamics, a process was created to manufacture beam structures that combine spans of 1 cm with a cross-section of 5 μm by 100 μm. The structural considerations limiting the fabrication of a structure combining macro-scale spans with a micro-scale cross-section are analyzed. Limiting considerations include forces during operation, fluid forces during release, ...

This article presents a micro-manufacturing method for direct, projection printing of 3dimensional (3D) scaffolds for applications in the field of tissue engineering by using a digital micro-mirror-array device (DMD) in a layer-by-layer process. Multi-layered scaffolds are microfabricated using curable materials through an ultraviolet (UV) photopolymerization process. The pre-patterned UV light...

Owing to the distinguishing properties of nondiffraction, self-healing, and transverse acceleration, Airy beams have attracted much attention in the past decade. To date, a simple approach for exquisitely fabricating cubic phase plates with both continuous variation of phase and micro size still remains challenging, which limits the generation of high-quality Airy beams for integrated micro-opt...

The processing techniques for micro and nano devices fabrication can be divided into two groups. On one hand, there are the techniques that allow the modification of a given substrate, e.g. ionic implantation, metallization, etching and thermal processes to either grow or deposit insulator layers. On the other hand, there are the processes that allow a pattern transfer of the designs onto the s...

The main objective of this paper is to introduce one of the promising Rapid Prototyping (RP) technology as a potential application for the fabrication and development of a Flapping Wing Micro Air Vehicle (a rubber band powered Ornithopter). The conventionally constructed Ornithopter of Balsa Wood has been compared with an Ornithopter of ABSM30 constructed using RP technology (Fused Deposition M...

In this paper, the issue of adhesion to biological substrates for biomedical applications is addressed. In particular, taking inspiration from intestinal parasites, micro-hooks for clamping on the gastrointestinal wall have been studied, in order to provide future endoscopic micro-systems with the capability of attaching safely to the mucosa surface. A novel fabrication technology and experimen...

We present design, fabrication, and characterization results of high numerical aperture (NA) micro-lenses based on a high contrast transmitarray platform. The high contrast transmitarray is created by periodic arrangement of amorphous silicon posts with different diameters on a fused silica substrate. We report near infrared high NA micro-lenses with spot sizes as small as 0.57λ and focusing ef...