The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed.

xPb(Sc1/2Nb1/2)O3–(1 − x)Pb(Hf1−yTiy)O3 piezoelectric ceramics were prepared by solid-state route, and the phase structures properties of systematically investigated. Results showed that sample with composition x = 0.07 y 0.53 possessed higher coexistence between rhombohedral tetragonal, exhibited optimal among different constituent systems, i.e., TC 355 °C, d33 400 pC/N, εr 1390, tan δ 1.05%. ...

Title of Document: ORIENTATION DEPENDENCE OF THE PIEZOELECTRIC PROPERTIES OF EPITAXIAL FERROELECTRIC THIN FILMS Jun Ouyang, Doctor of Philosophy, 2005 Directed By: Professor Alexander. L. Roytburd Dept. of Materials Science and Engineering There are both intrinsic piezoelectric response and extrinsic piezoelectric response in ferroelectric materials. The intrinsic piezoelectric response is due ...

in this paper, design and construction of a tactile sensor for measuring contact-force is presented. mechanism of measuring contact-force in this tactile sensor is based on impedance changing of piezoelectric crystal and voltage of different points in circuit as a result of applying force on the crystal. by considering a specific point in the circuit and recording the changes of its voltage, ma...

Ultrathin films of aligned cellulose nanocrystals (CNCs) were assembled on mica supports by using electric field-assisted shear. The relationship between polarization gradients and strain mechanics of the obtained films was examined by monitoring their deflection with an atomic force microscope operated in contact mode. The piezoelectric response of the films was ascribed to the collective cont...

-In this paper, piezoelectric actuation is compared with electrostatic actuation for application in RF-MEMS switches with respect to actuation voltage and technological implementation. The expression for the actuation voltages of electrostatic and piezoelectric actuation are discussed and compared with respect to scaling. Calculation examples show actuation voltages for a cantilever beam of 1μm...

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