This paper presents the experimental evaluation of a new piezoresistive MEMS strain sensor. Geometric characteristics of the sensor silicon carrier have been employed to improve the sensor sensitivity. Surface features or trenches have been introduced in the vicinity of the sensing elements. These features create stress concentration regions (SCRs) and as a result, the strain/stress field was a...

In this paper, we describe the design, fabrication and calibration results of a 6-degree of freedom force-moment micro sensing chip utilizing the piezoresistance effect in silicon. The sensing chip is designed to be able to simultaneously detect three components of force and three components of moment in three orthogonal directions. Conventional p-type and four-terminal p-type piezoresistors ha...

In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surfa...

Electronic Skins Safety is a core concern in human-robot collaboration (HRC), and the active safety control has attracted widespread attention. A capacitive piezoresistive hybrid sensor array (e-skins) for longdistance proximity wide-range force detection presented article 2100213 by Zhenlong Wang, Jie Zhao, PingAn Hu, Jia Zhang co-workers. The performance controlling commercial robots HRC show...

In this article, we report on the new design of a miniaturized strain microsensor. The proposed sensor utilizes the piezoresistive properties of doped single crystal silicon. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved. The current sensor design employs different levels of signal amplifications. These amplificati...

Tactile sensors are basically arrays of force sensors that are intended to emulate the skin in applications such as assistive robotics. Local electronics are usually implemented to reduce errors and interference caused by long wires. Realizations based on standard microcontrollers, Programmable Systems on Chip (PSoCs) and Field Programmable Gate Arrays (FPGAs) have been proposed by the authors ...

This paper is about designing a silicon based piezoresistive micro pressure sensor for greater sensitivity. Using Finite Element Analysis (FEA) the role played by important design parameters like the side length and the thickness of the pressure sensing membrane in determining the sensitivity of the sensor are studied in detail for a pressure of 100 kPa. The fracture stress of silicon is adopte...