The scaling laws associated with the miniaturization of planar inductively coupled plasmas (ICPs) are investigated. The applications for miniature ICPs include microelectromechanical systems (MEMS) for chemical analysis. Langmuir probe and microwave interferometry measurements of three ICPs with coil diameters of 5, 10, and 15 mm show that electron density typically falls in the range of 10 10 ...

Abstract Using Sagdeev potential approach the modified Bohm’s criterion is evaluated for magnetized electronegative warm plasma containing secondary electrons. Dependency of Bohm velocity on electrons, inclination angle magnetic field, collisionality, electronegativity and temperature ratio (electron to positive ions) are examined. found be independent magnitude field but depends its incidence ...

In this paper, we propose a promising signal-sensing method based on both single- and multiple-antenna covariance matrices of the received signal. comparison with microwave diagnostics or energy detection, proposed does not need prior information signal noise. Therefore, it can be widely used in noise power uncertainty scenarios, such as transmission hypersonic plasma sheath, symmetry to cognit...

Particle energization in shear flows is invoked to explain non-thermal emission from the boundaries of relativistic astrophysical jets. Yet, physics particle injection, i.e., mechanism that allows thermal particles participate shear-driven acceleration, remains unknown. With particle-in-cell simulations, we study development Kelvin-Helmholtz (KH) instabilities seeded by velocity between a magne...

Cells from a variety of sources, principally differentiating fibroblasts and smooth muscle cells from neonatal chicken and mammalian tissues and from organ cultures of chicken duodenum, were used as materials for an electron microscopic study on the formation of rudimentary cilia. Among the differentiating tissues many cells possessed a short, solitary cilium, which projected from one of the ce...

During the oxide layer etching process, particles in capacitively coupled plasma equipment adhere to wafer edge and cause defects that reduce yield from semiconductor wafers. To particle contamination equipment, we propose changes voltage temperature of electrostatic chuck, discharge sequence, gas flow, pressure parameters during process. The proposed reduction method was developed by analyzing...

A self-consistent kinetic particle-in-cell model has been developed to describe a radiation driven plasma. Collisions between charged species and the neutral background are represented statistically by Monte Carlo collisions. The weakly ionized plasma is formed when extreme ultraviolet radiation coming from a pulsed discharge photoionizes a low pressure argon gas. The presence of a plasma close...

Diameter, organization, and length of the myelin sheath are important determinants of the nerve conduction velocity, but the basic molecular mechanisms that control these parameters are only partially understood. Cell polarization is an essential feature of differentiated cells, and relies on a set of evolutionarily conserved cell polarity proteins. We investigated the molecular nature of myeli...

A microplasma is generated in the microhole (400 μm diameter) of a molybdenum-aluminamolybdenum sandwich (MHCD type) at medium pressure (30-200 Torr) in pure argon. Imaging and emission spectroscopy have been used to study the light emission mechanisms in the microdischarge. We find that emission intensities of both argon atom and argon ion lines present sharp peaks located near the cathode, an...