Third-order, micromechanical bandpass filters comprised of three folded-beam resonators coupled by flexural mode springs are demonstrated using an IC-compatible, polysilicon surface-micromachining technology. The use of quarter-wavelength coupling beams attached to resonators at their folding-trusses is shown to suppress passband distortion due to finite-mass nonidealities, which become increas...

We design, fabricate and characterize a CMOS-compatible, Mach-Zehnder-coupled, second-order-microring-resonator filter with large Free Spectral Range and demonstrate non-blocking thermo-optical filter reconfiguration. The device consists of 10-μm radius silicon microring resonators, with an FSR equivalent to that of a structure consisting of 5-μm radii microrings. The structure is reconfigurabl...

The buried hetero-structure (BH) InGaAsP-InP waveguide is used for asystem of double microring resonators (DMR). The light transmission and location ofresonant peaks are determined for six different sets of ring radii with different ordermode numbers. The effect of changing middle coupling coefficient on the box likeresponse is studied. It is found that the surge of coupling coefficient to the ...