2D transition metal dichalcogenide semiconductor (TMDs) nanocircuits are deterministically engineered over large-scale substrates. This original additive nanolithography approach combines large-area physical growth of TMDs layer with high resolution thermal-scanning probe lithography, to reshape the ultra-thin semiconducting layers at nanoscale level. The nanofabrication few-layer MoS2 nanostru...

In the past two decades, we have witnessed significant progress in developing high performance stimuli-responsive polymeric materials. This review focuses on recent developments in the preparation and application of patterned stimuli-responsive polymers, including thermoresponsive layers, pH/ionic-responsive hydrogels, photo-responsive film, magnetically-responsive composites, electroactive com...

X-ray diffraction techniques are used in imaging mode in order to characterize micrometre-sized objects. The samples used as models are metal-oxide tunnel junctions made by optical lithography, with lateral sizes ranging from 150 µm down to 10 µm and various shapes: discs, squares and rectangles. Two approaches are described and compared, both using diffraction contrast: full-field imaging (top...

The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well as a mechanism for very precise nanofabrication [...

The authors demonstrate 1.6 GHz surface acoustic wave SAW generation using interdigital transducers patterned by e-beam lithography on a thin ZnO piezoelectric film deposited on an InP substrate. The highly oriented, dense, and fine-grain ZnO film with high resistivity was deposited by radio frequency magnetron sputtering and was characterized by x-ray diffraction, scanning electron microscopy,...

Abstract As the bridge between basic principles and applications of nanotechnology, nanofabrication methods play significant role in supporting development nanoscale science engineering, which is changing improving production lifestyle human. Photo lithography other alternative technologies, such as nanoimprinting, electron beam lithography, focused ion cutting, scanning probe have brought grea...

We report the development of micromachined passive and active probe arrays for parallel dip pen nanolithography (DPN). DPN is a soft lithography method that allows direct, mask-less deposition of chemicals onto substrates with sub 100-nm resolution. An active DPN probe with thermal bimetallic actuation has been developed and tested. Lithographic results and an analytical tool for optimizing act...

Abstract This contribution deals with the analysis of positioning accuracy a new Nano Fabrication Machine. machine uses planar direct drive system and has range up to 100 mm in diameter. The was investigated different movement scenarios, including phases acceleration deceleration. Also, target position error certain movements at positions slider is considered. Currently, NFM-100 equipped tip-ba...