A model for a chaotic micro-oscillator is developed by adding a new control system to an electrostatic actuator consisting of two electrodes: the substrate and a cantilever beam on top. The electrostatic actuator itself has a single stable equilibrium over a range of voltage, whereas adding the controller, which has a quadratic function, creates a voltage range for bistability. The bi-stability...

The dielectric charging constitutes a major problem that still inhibits the commercial application of RF MEMS capacitive switches. The effect arises from the presence of the dielectric film (Fig.1a), which limits the displacement of the suspended electrode and determines the device pull-down state capacitance. Macroscopically, the dielectric charging is manifested through the shift (Fig.1b) (Re...

active flow control has great importance in design of flying objects in general and control flaps in particular. using dielectric barrier discharge as plasma actuators over control flaps can cause a change in position of separation point or can eliminate it. this new flow control device produces a body force that causes generating a micro wall jet. the present study aims to investigate experime...

Free vibration of an axially loaded silicon microbeam in MEMS under electrostatic actuation is studied on the basis a sinusoidal shear deformation theory. Based modified couple stress theory (MCST) and von Kármán geometric nonlinearity, nonlinear finite element formulation derived employed to construct discrete governing equations for microbeam. The deflection at given DC voltage firstly calcul...

Dielectric Elastomer Actuators In article number 2213589, Kilwon Cho and co-workers report a flexible skin-mountable vibrotactile-stimulator based on thin lateral dielectric elastomer actuators. The actuator shows significant actuation at low operating voltage because of laterally aligned multilayer structure with short distance soft elastomer/ionic liquid composite. covers broad perception fre...

This thesis describes electrostatic actuation techniques and mechanical design features for realizing large planar analog vertical travel in an electrostatically actuated diffractive mid-infrared optical device, which is robust, both to manufacture, and against pull-in during use. This device, called the Polychromator, is fabricated by polysilicon surface-micromachining and consists of many par...

Materials and Methods Fig. S1. Heat-press used for sealing BOPP pouches. Fig. S2. Fabrication process for Peano-HASEL actuators with hydrogel electrodes. Fig. S3. Fabrication process for Peano-HASEL actuators with aluminum electrodes. Fig. S4. Voltage signal with reversing polarity used during force-strain tests. Fig. S5. Example of damage to aluminum electrodes after voltage cycling. Fig. S6. ...

The inherent elasticity of dielectric elastomer actuators (DEAs) gives this technology great potential in energy efficient locomotion applications. In this work, a modular double cone DEA is developed with reduced manufacturing and maintenance time costs. This actuator can lift 45 g of mass (5 times its own weight) while producing a stroke of 10.4 mm (23.6% its height). The contribution of the ...