We have studied the effect of oxidation on the propagation loss and surface roughness of silicon-on-oxidized-porous-silicon strip waveguides fabricated using proton-beam irradiation and electrochemical etching. A thin thermal oxide is formed around the core of the waveguide, enabling the symmetric reduction of core size and roughness on all sides. Significant loss reduction from about 10 dB/cm ...

: In this work, a new approach for the one-step integration of interdigitated electrodes on macroporous silicon substrates is presented. Titanium/gold interdigitated electrodes are used to pattern p-type silicon substrates prior the anodization in an organic electrolyte. The electrolyte characteristics, conductivity, and pH have been found to affect the adherence of the metal layer on the silic...

The growing demand for electro mobility together with advancing concepts for renewable energy as primary power sources requires sophisticated methods of energy storage. In this work, we present a Li ion battery based on Si nanowires, which can be produced reliable and cheaply and which shows superior properties, such as a largely increased capacity and cycle stability. Sophisticated methods bas...

Analysis concept of gaseous or liquid media using porous silicon multilayers with optical sensing is presented. The sensor consists of optical filter with λ/4 layers, fabricated by electrochemical etching in HF/ethanol. The optical system is tested with ampicillin and shows a linear dependence with increasing ampicillin concentration. For general sensing applications the influences of porosity ...

This work gives a brief review of proton beam writing and electrochemical etching process for the fabrication of smooth optical devices in bulk silicon. Various types of structures such as silicon-on-oxidized porous silicon waveguides, waveguide grating and disk resonators have been produced. Optical characterization has been carried out on the waveguides for both TE and TM polarization using f...

A new method of using photo-electromotive force in detecting gas and controlling sensitivity is proposed. Photo-electromotive force on the heterojunction between porous silicon thin layer and crystalline silicon wafer depends on the concentration of ammonia in the measurement chamber. A porous silicon thin layer was formed by electrochemical etching on p-type silicon wafer. A gas and light tran...

Multilayer nanowires tailored with alternating AuFe porous layers and Au nonporous segments were fabricated by galvanic square-wave pulsed electrodeposition from a AuFe cyanide-free electrolyte. Control of porosity and composition was achieved via modulation in pulsed time and applied current density. Nanowires with decreased porosity were observed upon increasing time of the AuFe alloy layer o...

Real-time monitoring of carbon nanotube conductance during electrochemical and chemical etching reveals the electronic signatures of individual bond alteration events on the nanotube sidewall. Tracking the conductance of multiple single-molecule experiments through different synthetic protocols supports putative mechanisms for sidewall derivatization. Insights gained from these mechanistic obse...

An alkaline hydrothermal and acid etching process was used to prepare surface-coarsened anatase TiO2 nanobelts (CTNs) with enhanced (001) facets. The CTNs were used for electrochemical selective determination of the perfect match and mismatch of single nucleobases at the physiological pH of 7.4. It is supposed that the structure and surface morphology of CTNs play important roles in the nature ...

We have successfully fabricated low-loss silicon-on-oxidized-porous-silicon (SOPS) strip waveguides with high-index contrast using focused proton-beam irradiation and electrochemical etching. Smooth surface quality with rms roughness of 3.1 nm is achieved for a fluence of 1x10(15)/cm(2) after postoxidation treatment. Optical characterization at a wavelength of 1550 nm shows a loss of 1.1+/-0.4 ...