This paper presents a novel dosing concept for drug delivery based on a peristaltic piezo-electrically actuated micro membrane pump. The design of the silicon micropump itself is straight-forward, using two piezoelectrically actuated membrane valves as inlet and outlet, and a pump chamber with a piezoelectrically actuated pump membrane in-between. To achieve a precise dosing, this micropump is ...

Development of a moving reflector type micro optical switch fabricated by deep reactive ion etching (DRIE) in silicon on insulator (SOI) substrates is presented. The device discussed is a key component in a MEMS-based safety and arming (S&A) system for use in underwater weapons. In this switch, an etched vertical sidewall reflector is electrostatically actuated in and out of the optical path be...

Bubble-powered acoustic microsystems span a plethora of applications that range from lab-on-chip diagnostic platforms to targeted interventions as microrobots. Numerous studies strategize this bubble-powered mechanism generate autonomous self-propulsion microrobots in response high frequency sound waves. Herein, we present two micro-propeller designs which contain an axis-symmetric distribution...