Hot embossing of micro-lens array on bulk metallic glass C.T. Pan a,∗, T.T. Wu a, M.F. Chen a, Y.C. Chang b, C.J. Lee b, J.C. Huang b a Department of Mechanical and Electro-Mechanical Engineering, and Center for Nanoscience & Nanotechnology, National Sun Yat-Sen University, Kaoshiung 804, Taiwan, ROC b Institute of Materials Science & Engineering, Center for Nanoscience and Nanotechnology, Nati...

The electric impedance of cultured myoblasts oriented on the scaffold with micro pattern has been measured between surface electrodes in vitro. Several parallel lines of micro rectangular ridges (0.001 mm height, 0.003 mm width, and 0.003 mm interval) have been made between a pair of the surface titanium electrodes at the surface of the scaffold of glass by the photolithography technique. C2C12...

The design, fabrication and performance of a novel and highly sensitive micro-reactor device for performing in situ grazing-incidence X-ray scattering experiments of model catalyst systems is presented. The design of the reaction chamber, etched in silicon on insulator (SIO), permits grazing-incidence small-angle X-ray scattering (GISAXS) in transmission through 10 µm-thick entrance and exit wi...

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...

During recent years, microelectronics helped to develop complex and varied technologies. It appears that many of these technologies can be applied successfully to realize Seebeck micro generators: photolithography and deposition methods allow to elaborate thin thermoelectric structures at the micro-scale level. Our goal is to scavenge energy by developing a miniature power source for operating ...

The MIT Microengine Project is an ongoing effort to build a MEMS based gas turbine engine and turbogenerator. This thesis covers the development and testing of the packaging needed for the microengine and related devices. The packaging of the microengine includes the fluidic, electrical, and sensor connections that interface the engine with the supplies and instruments necessary for operation. ...

Polysilicon wine-glass mode micromechanical disk resonators using a stemless, non-intrusive suspension structure have been demonstrated in both vacuum and atmospheric pressure at frequencies around 73.4 MHz with Q’s as high as 98,000 in vacuum, and 8,600 in atmosphere—the highest ever reported Q’s at this frequency range and in these environments for any on-chip micro-scale resonator. The Q of ...

Systematic of ternary oxyfluotellurite tellurite glasses in the form (TeO2)90(AlF3)90x(ZnO)x have been successfully prepared. Both longitudinal and shear ultrasonic velocities were measured in different compositions of the glass system by using the MBS8000 Ultrasonic Data Acquisition System at 10 MHz frequency and at room temperature. The elastic properties of ternary telluirte glasses (TeO2)90...

To facilitate the cell based robot research, we presented a micro-mechanical force measurement system for the biological muscle actuators, which utilize glucose as a power source for potential application in a human body or blood vessels. The system is composed of a micro-manipulator, a force transducer with a glass probe, a signal processor, an inverted microscope and video recoding system. Us...