ABSTRACT Noria derivatives containing protective groups such as t-BOC group, t-butyl ester group (t-BAc), adamantyl group (Ad) were synthesized and evaluated as alkaline developable positive-type EBand EUV-resists. As the result, it was cleared that Noria-t-BOC and Noria-t-BAc showed 50 nm and 70 nm resolutions as EB-resists, respectively. Noria-Ad also showed clear line and space pattern with ...
