RF MEMS are commonly known as electrostatic devices using high electric field for their actuation. They can be exposed to transient voltages in any environment, and are very sensitive. According to this point of view, it is necessary to understand and analyze the degradations and failure criteria that can make them useless or reduce their lifetime. This paper deals with the investigation of ESD...

We present the design, fabrication, and testing of a microelectromechanical systems (MEMS) light modulator based on pixels patterned with periodic nanohole arrays. Flexure-suspended silicon pixels are patterned with a two dimensional array of 150 nm diameter nanoholes using nanoimprint lithography. A top glass plate assembled above the pixel array is used to provide a counter electrode for elec...

This paper presents the successful demonstration of a large-stroke, high-precision inchworm microactuator. The actuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of a PZT-stack actuator unit for slider thrust and electrostatic comb-drive units for slider grip. Incremental step size is precis...

We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening beha...

Inchworm based on the voltage actuation of dielectric elastomer actuators (DEAs) are amongst the simplest types of robots. We demonstrate a proof-of-concept inchworm robot that incorporates a few aligned fibers to suppress undesirable actuator bulging and more effectively convert the bending of a dielectric elastomer unimorph to forward motion. Finite element modeling confirms the role of the f...

This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer leve...

We fabricated large arrays of suspended, single-layer graphene membrane resonators using chemical vapor deposition (CVD) growth followed by patterning and transfer. We measure the resonators using both optical and electrical actuation and detection techniques. We find that the resonators can be modeled as flat membranes under tension, and that clamping the membranes on all sides improves agreem...

The different peculiarities of distribution systems added to the variability generation and integration by sources distributed generation, bring with them challenges for adaptation entire network and, mainly, its protection systems. In this context, work analyzes impacts caused system a after photovoltaic solar source against test scenarios insertion occurrence faults. results demonstrate influ...

Subject to a voltage, a dielectric elastomer (DE) deforms. Voltage-induced strains of above 100% have been observed when DEs are prestretched, and for DEs of certain network structures. Understanding mechanisms of large actuation strains is an active area of research. We propose that the voltage-stretch response of DEs may be modified by prestretch, or by using polymers with ‘‘short’’ chains. T...