This paper describes the design, manufacturing and characterization of newly developed mixed thick-/thin film thermoelectric microgenerators based on magnetron sputtered constantan (copper-nickel alloy) and screen-printed silver layers. The thermoelectric microgenerator consists of sixteen thermocouples made on a 34.2 × 27.5 × 0.25 mm³ alumina substrate. One of thermocouple arms was made of mag...

Aluminum nitride films have been deposited on Si~111! substrates at different substrate temperatures using two techniques; pulsed laser deposition or reactive magnetron sputtering. The films deposited by either of the techniques have been characterized by x-ray diffraction and transmission electron microscopy to determine the crystalline quality, grain size, and epitaxial growth relation with r...

Protective ultra-thin barrier films gather increasing economic interest for controlling permeation and diffusion from the biological surrounding in implanted sensor and electronic devices in future medicine. Thus, the aim of this work was a benchmarking OPEN ACCESS Coatings 2013, 3 269 of the mechanical oxygen permeation barrier, cytocompatibility, and microbiological properties of inorganic ~2...

The lower deposition rate for high power impulse magnetron sputtering (HiPIMS) compared to direct current magnetron sputtering for the same average power is often reported as a drawback. The often invoked reason is back-attraction of ionized sputtered material to the target, due to a substantial negative potential profile from the location of ionization towards the cathode. Emitting and swept L...

Effect of polarity in substrate for ZnO growth was researched. The zinc oxide films were deposited on SiOC/Si wafer by a RF magnetron sputtering system. SiOC film was also deposited by RF magnetron sputtering to obtain a low temperature process. Polarity in SiOC film changed with increasing the oxygen gas flow rates, and the chemical shift in the PL spectra was observed because of lowering the ...

FeMn alloys show a great potential for the use as a biodegradable material for medical vascular implants. To optimize the material properties, with respect to the intended application, new fabrication methods also have to be investigated. In this work different Fe-FeMn32 multilayer films were deposited by magnetron sputtering. The deposition was done on a substrate structured by UV lithography....

Modulated pulse power MPP technology is a derivative of high power pulsed magnetron sputtering that allows unprecedented user control over the growth process, although the critical time-dependent plasma properties during the power pulse have not been studied until now. Using a MPP plasma generator, pulses of custom voltage waveforms were generated and applied to the cathode of a 36 cm diameter ...

Due to its convenience, wear ability, affinity, continuously monitoring biological signal, etc., fabric electrodes used in biological signal acquisition attracted more and more interest from researchers around the world. Fabric electrode is a kind of intelligent textiles, and its application is very prominent in biological signal acquisition, supercapacitors and ECG (electric signal) monitoring...

Nanoscale multilayer nitride coatings deposited by advanced PVD techniques have shown particular promise in improving the tribological properties of a number of modal alloy steels [1]. In this study, we report the effect of temperature on the friction and wear behaviour of a CrAlYN/CrN multilayer coating with a CrAlYON/CrON topcoat deposited on γ-TiAl. Deposition was performed by unbalanced mag...

Bismuth complex oxides, in particular, bismuth tungstate, have recently attracted attention as promising photocatalytic materials for water treatment processes. In the present work, photocatalytic bismuth tungstate films were prepared by pulsed direct current (DC) reactive magnetron sputtering of Bi and W targets in an Ar/O2 atmosphere onto spherically-shaped glass beads. The uniform coverage o...