Anisotropic wet etching is a most widely employed for the fabrication of MEMS/NEMS structures using silicon bulk micromachining. The use of Si{110} in MEMS is inevitable when a microstructure with vertical sidewall is to be fabricated using wet anisotropic etching. In most commonly employed etchants (i.e. TMAH and KOH), potassium hydroxide (KOH) exhibits higher etch rate and provides improved a...

UNLABELLED Nested effects models (NEMs) are a class of probabilistic models introduced to analyze the effects of gene perturbation screens visible in high-dimensional phenotypes like microarrays or cell morphology. NEMs reverse engineer upstream/downstream relations of cellular signaling cascades. NEMs take as input a set of candidate pathway genes and phenotypic profiles of perturbing these ge...

OBJECTIVE To estimate the workload and size the nursing team using the scales TISS-28 and NEMS in a pediatric intensive care unit. METHODS An observational prospective study with a quantitative approach was conducted at the pediatric intensive care unit of a university hospital from Jan 1st, 2009 to Dec 31st, 2009. All children who remained hospitalized for more than 8 hours were included, wi...

The measurement of the rotation of rigid solids is of considerable interest in a number of areas. Rotation detectors are not only used in aircraft, missiles etc. military fields have also been developed for new civil fields such as automobile navigation, antenna stabilization, crane control, unmanned vehicle control, wind and renewable energy platform stabilization. In this paper, the fundament...

Using microfabrication techniques, it has become possible to make mechanical devices with dimensions in the micro and even in the nano scale domain. Allied to low temperature techniques, these systems have opened a new path in physics with the ultimate goal of reaching the quantum nature of a macroscopic mechanical degree of freedom1. Within this field, materials research plays a significant ro...

Many MEMS devices are based on polysilicon because of the current availability of surface micromachining technology. However, polysilicon is not the best choice for devices where extensive sliding and/or thermal fields are applied due to its chemical, mechanical and tribological properties. In this work, we investigated the mechanical properties of three new materials for MEMS/NEMS devices: sil...

Nanoelectromechanical systems (NEMS) resonators can detect mass with exceptional sensitivity. Previously, mass spectra from several hundred adsorption events were assembled in NEMS-based mass spectrometry using statistical analysis. Here, we report the first realization of single-molecule NEMS-based mass spectrometry in real time. As each molecule in the sample adsorbs on the resonator, its mas...

Microcantilever deflection and the membrane deflection experiment (MDE) were used to examine the elastic and fracture properties of ultrananocrystalline diamond (UNCD) thin films in relation to their application to microelectromechanical systems (MEMS). Freestanding microcantilevers and membranes were fabricated using standard MEMS fabrication techniques adapted to our UNCD film technology. Ela...