UNLABELLED The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ult...

MEMS and NEMS use application is growing their market expanding. With the development of 5G IoT technologies number components always increasing. In this paper an introduction to MEMS/NEMS definition, categories, advantages. Fabrication techniques are discussed. Finally, elaborative analysis different applications MEMS/NEMS, followed by a discussion future Micro / Nano electromechanical Systems.

This paper presents a review of MEMS based piezoelectric energy harvesting for low frequency and low power applications. An introduction to MEMS and its components along with the concept of energy harvesting is presented. The paper also presents a device configuration of cantilever based basic components of MEMS energy harvesters, i.e. unimorph, bimorph. Results of different designs for MEMS en...

In this work, a study of MEMS (Micro electro mechanical system) and SUGAR simulator is presented. A MEMS power switch is implemented and the insertion loss, return loss with respect to frequency and ON and Off states of these loss with respect to frequency is studied. Ultra low ON state insertion loss, high off state isolation and high RF signal power handling characteristics are achieved .Many...

A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked together; leading towards enhanced in...

This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The ...

Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonline...

Cost and space constraints are currently driving manufacturers of Mobile Mapping Systems (MMS) and location based services to investigate and develop next generation of low cost and small size navigation systems to meet the fast growing mobile mapping and location services market demands. Advances in Micro-Electro-Mechanical Systems (MEMS) technology have shown promising light towards the devel...

A knowledge-based computer-aided design tool for microelectromechanical systems (MEMS) design synthesis called case-based synthesis of MEMS (CaSyn-MEMS) has been developed. MEMS-based technologies have the potential to revolutionize many consumer products and to create new market opportunities in areas such as biotechnology, aerospace, and data communications. However, the commercialization of ...

The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional communication components because they consume less DC power, have lower losses, higher linearity and higher Q factor. However, the commercialization of RF MEMS devices is hindered by technological issues such as their...