The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. 1 Introduction MEMS devices and systems offer advantages of small volume, light weight, low power, and the integration of ...

To solve the coupling and optimizing problems in MEMS designing and analyzing process, the paper mainly put forward to the uniform model construction simulation method. The method adopt uniform constraints to describe MEMS multi-fields simulation model, firstly construct MEMS model library which includes structure, electricity, magnetic, thermal and fluid elements in multi-field uniform languag...

Although cochlear implant (CI) users have enjoyed good speech recognition in quiet, they still have difficulties understanding speech in noise. We conducted three experiments to determine whether a directional microphone and an adaptive multichannel noise reduction algorithm could enhance CI performance in noise and whether Speech Transmission Index (STI) can be used to predict CI performance i...

The relative fundamental frequency (RFF) surrounding the production of a voiceless consonant has previously been estimated using unprocessed and low-pass filtered microphone signals, but it can also be estimated using a neck-placed accelerometer signal that is less affected by vocal tract formants. Determining the effects of signal type on RFF will allow for comparisons across studies and aid i...

Flexible microphone and earphone prototypes for wearable applications were developed by using ElectroMechanical Film (EMFi). A suitable application for the developed headset can be, for instance, as accessory of rescue services or sport enthusiasts. Due its versatile properties, EMFi can be used both as microphone and earphone material. The sensor operation is based on thickness changes caused ...

An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.

In previous studies, the localisation accuracy and the spatial impression of 3-2 stereo microphone arrays were discussed. These showed that 3-2 stereo cannot produce stable images to the side and to the rear of the listener. An octagon loudspeaker array was therefore proposed. Microphone array design for this loudspeaker configuration was studied in terms of localisation accuracy, locatedness a...

This paper investigates the use of microphone arrays to acquire and recognise speech in meetings. Meetings pose several interesting problems for speech processing, as they consist of multiple competing speakers within a small space, typically around a table. Due to their ability to provide hands-free acquisition and directional discrimination, microphone arrays present a potential alternative t...

In this paper, a novel design of a biology-inspired directional microphone is presented. This microphone consists of two clamped circular diaphragms, which are mechanically coupled by a connecting bridge that is pivoted at its center. A mechanics based model is constructed to determine the response of the proposed directional microphone to sound incident from an arbitrary direction. The simulat...