Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involves phenomena occurring at several length-scales. In this paper we present a multi-scale finite element approach to properly allow for: (i) the propagation of stress waves inside the package; (ii) the dynamics of the whole MEMS; (iii) the spreading of micro-cracking in the failing part(s) of the se...

In order to get a methane catalytic combustion micro-sensor, two different catalytic systems used in traditional methane catalytic combustion sensors were fabricated into a mesoporous structure and their catalytic activities were investigated. In comparison, the Rh2O3-Al2O3 system can form more a uniform mesoporous structure and has a much higher specific surface area. Even more importantly, it...

The concept of using the steering angle sensor to enhance positioning accuracy during Global Positioning System (GPS) outages is the focus of this article. This development of a GPS Micro-Electro-Mechanical Systems Inertial Measurement Unit (MEMS IMU) steering angle sensor vehicular positioning system is discussed in detail including the error dynamics and measurement models as well as integrat...

This paper presents a study on the design and analysis of capacitively based Micro-Electro-Mechanical Systems (MEMS) sensor for continuous glucose monitoring (CGM) applications. This sensor consists of Parylene diaphragm, which is driven by a magnetic field and situated inside a micro chamber. A biocompatible sensing solution fills the micro chamber, which is separated from its surroundings by ...

Micro-electro-mechanical-systems (MEMS) have seen a very steep progression in R&D in the 1980s and 1990s, both in academia and industry. The rapid growth has been enabled by new fabrication methods derived from semiconductor integrated circuit manufacturing. These are basically lithography, thin film deposition dry and wet etching, which were tailored for MEMS purposes, since MEMS often uses si...

The underwater glider has the advantages of low power, long endurance and high accuracy. Micro-Electro-MechanicalSystem (MEMS) grade inertial sensors are more suitable for an underwater glider because of their low cost and small size. Models of MEMS sensor noises which include not only the white noises and random walk terms but also the bias instabilities of the sensor noises are analyzed. The ...

In this paper we discuss newly developed microfabrication methods for liquid crystal polymer (LCP). LCP is a thermoplastic polymer made of aligned molecule chains with crystal-like spatial regularity. It exhibits unique electrical, physical and chemical properties, making it suitable for certain MEMS applications. MEMS-compatible fabrication processes such as metallization, plasma bulk etching ...

Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent widely used microelectromechanical system (MEMS) devices excellent reliable performance. MEMS acceleration sensors established dominance mainly navigation control applications. In recent years, however, materials have emerged that introduce novel sens...

Wall heat transfer is one of the most important aspects internal combustion engines. In this study, local instantaneous characteristics were investigated using an originally developed thin-film resistance-type sensor. The sensor, which was fabricated by micro-electro-mechanical systems (MEMS) technology, had advantages in sensitivity, spatial resolution, and number measurement points compared w...