نتایج جستجو برای: mems vibratory gyroscope
تعداد نتایج: 13526 فیلتر نتایج به سال:
The bell-shaped vibratory angular rate gyro (abbreviated as BVG) is a novel shell vibratory gyroscope, which is inspired by the Chinese traditional bell. It sensitizes angular velocity through the standing wave precession effect. The bell-shaped resonator is a core component of the BVG and looks like the millimeter-grade Chinese traditional bell, such as QianLong Bell and Yongle Bell. It is mad...
This paper presents an adaptive variable structure controller with on-line identification of the upper bounds of uncertainties and disturbance for MEMS triaxial angular sensors device that is able to detect rotation in three orthogonal axes, using a single vibrating mass. A robust adaptive sliding mode controller is developed and the stability of the closed-loop system can be guaranteed with th...
An ultra-deep (40–120 μm) keyhole-free electrical isolation trench with an aspect ratio of more than 20:1 has been fabricated. The process combines DRIE (deep reactive ion etch), LPCVD insulating materials refilling and TMAH or KOH backside etching technologies. Employing multi-step DRIE with optimized etching conditions and a sacrificial polysilicon layer, the keyholes in trenches are prevente...
Fixtures are used to locate and hold parts during automated inspection, machining, or assembly. Microelectromechanical systems (MEMS) are tiny devices built in batch processes derived from integrated circuit fabrication. We describe a design for an array of MEMS microfixtures for parallel inspection, transport, and assembly of microfabricated parts. In a microfixture array, parts are brought ne...
The intelligent digital 3-axis IMU system integrated with the MEMS sensing cores, the signal processing electronics, and the network interface is presented. The MEMS sensing cores are fabricated by using the SBM (Sacrificial Bulk Micromachining) process. The fabricated sensing core accomplishes the high performance, high yield and high reliability by the inherent high-aspect-ratio, footing-free...
In airborne MEMS SINS transfer alignment, the error of MEMS IMU is highly environment-dependent and the parameters of the system model are also uncertain, which may lead to large error and bad convergence of the Kalman filter. In order to solve this problem, an improved adaptive incremental Kalman filter (AIKF) algorithm is proposed. First, the model of SINS transfer alignment is defined based ...
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