Electro-thermal actuation mechanism continues to attract attention of MEMS designers as a reliable method of delivering high displacements and high actuation forces [1]. The main purpose of this work is to conduct a coupled multi-physics FEA of a micro-machined electro-thermomechanical actuator (μETMA) in order to determine a nature of a common failure mode, suggest a better fabrication process...

High-speed micro-lens actuators are required for fast auto-focusing in miniaturized cameras. The speed can be enhanced by adding damping at the resonance frequency through feedback control. Previous approaches to implement control were based on expensive OFF-chip bulky laser sensors that not suitable In this article, using an ON-chip self-sensing piezoelectric sensor with a novel readout circui...

This work presents the results of experimental and theoretical study static pull-in tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on combination inductive electrostatic actuation. A semi-analytical model to such phenomenon is developed, for first time, as result using qualitative technique Lagrangian approach analyze contactless suspensions recent progress in cal...

The objective of current paper is 3D simulation of turbulent, developing flow and unsteady within a circular duct in presence of the body force vector persuaded by Dielectric barrier discharge (DBD) plasma actuator inside the surface of geometry for the first time. This article aims at investigating of applying plasma actuator to control separation with special arrangement of electrodes. For th...

Micro Piezo technology is offering superior features in ink ejection performance, compatibility with a wide variety of inks, and durability. As a result, this technology has already being utilized effectively in various commercial and industrial fields such as photo lab printing, digital printing, textile printing, and color filter manufacturing. However, new printheads that have a larger numbe...