In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touchdown whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical divergence of the electric field. In the present work, we propose novel regularized governing equations whose solutions remain finite at touchdown and exhibit addit...

In the area of Micro Electro Mechanical Systems (MEMS), bulk micromachining and surface micromachining are two main technologies. Bulk micromachining defines structures by selectively etching inside a substrate while surface micromachining uses a succession of thin film deposition and selective etching on top of a substrate. The two technologies are quite different, resulting in different dimen...

Visualizations are a crucial component in CAD systems, typically displaying design layout or physical behavior. In this paper we introduce in an innovative way visualizations, that combine both, the display of physical dimension and abstract concepts. These types of visualizations are part of MAGDA a CAD system for Micro Electro Mechanical Systems (MEMS). In MAGDA we display the geometries of t...

As improvements in fabrication technology for MEMS (micro electro mechanical systems) increase the availability and diversity of these micromachines, engineers are deening a growing number of tasks to which they can be put. The idea of carrying out tasks using coordinated systems of MEMS units motivates the development of automated, algorithmic methods for modeling, designing and controlling th...

Research Objectives Our multifaceted research program is aimed at the fundamental and practical development of hybrid micro-electro-mechanical-systems (MEMS) that integrates several elements of chemical selectivity and sensor function. We are developing MEMS sensors that combine chemimechanical transduction, and surface enhanced Raman spectroscopy (SERS) and radiation detection. One of our goal...

A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equation...

Catalytic combustion is a promising technique for producing thermal energy in MEMS(Micro Electro-Mechanical Systems) scale electrical power generators. To examine the feasibility and possible benefits of catalytic combustion in MEMS-scale channels, catalytic reactions in small diameter (1 mm) flow reactor tubes at low Reynolds numbers are simulated by using the commercial fluid dynamics code FL...

Micro-Electro-Mechanical System (MEMS) is one of the few commercial platforms for building optical switches. 2D MEMS L-switching matrix has been introduced recently to double the sizes of 2D MEMS crossbar switches. The sizes of switches are mainly limited by the Gaussian signal loss associated path difference. Though the design of L-switching matrix improves system scalability but it suffers in...

The miniaturization and development of complex Micro Electro Mechanical Systems (MEMS) led to a need for an increase in performance of such systems in terms of displacement range, accuracy, velocity etc. There is a huge potential of using them as tools in nanonoscience such as high-density probe memory applications, scanning probe microscopy (e.g. nanolithography, prototyping of nanostructures)...