Micro-Electro-Mechanical System (MEMS) is one of the few commercial platforms for building optical switches. 2D MEMS L-switching matrix has been introduced recently to double the sizes of 2D MEMS crossbar switches. The sizes of switches are mainly limited by the Gaussian signal loss associated path difference. Though the design of L-switching matrix improves system scalability but it suffers in...

In silicon surface micromachining, anhydrous HF GPE process was verified as a very effective method for the dry release of microstructures. The developed gas-phase etching (GPE) process with anhydrous hydrogen fluoride (HF) gas and alcoholic vapor such as methanol, isopropyl alcohol (IPA) was characterized and its selective etching properties were discussed. The structural layers are P-doped mu...

This paper signifies a very basic design and simulation techniques of RF MEMS switches using the advanced design systems software tool (ADS).Micro electro mechanical systems are recent development technologies which has better characteristics performance and also operating at microwave range of frequencies. Fundamentally MEMS switches can be categorized into two types series switches (ohmic typ...

In the last few years several types of MEMS-based spectrometer systems emerged, mainly addressing the NIR spectral range. The presented MEMS-based sensor prototype operates in the mid-IR range between 2200 cm and 2500 cm. The main element is a blazed micro-electro-mechanical reflective grating device with an aperture of 3x3 mm2. The optical setup of the sensor corresponds to a Czerny-Turner typ...

By combining substrate-free structures with anodic bonding technology, we present a simple and efficient micro-electro-mechanical system (MEMS) thermal shear stress sensor. Significantly, the resulting depth of the vacuum cavity of the sensor is determined by the thickness of silicon substrate at which Si is removed by anisotropic wet etching process. Compared with the sensor based on a sacrifi...

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy a...

The diffusion of micro electro-mechanical systems (MEMS) technology applied to navigation systems is rapidly increasing, but currently, there is a lack of knowledge about the reliability of this typology of devices, representing a serious limitation to their use in aerospace vehicles and other fields with medium and high requirements. In this paper, a reliability testing procedure for inertial ...

Abstract In this paper, we mainly design two modulation ratios of Al/Ni reactive films, prepare TaN@(Al/Ni) by MEMS (Micro-Electro-Mechanical Systems) technology, and conduct firing experiments using capacitive firing. The experimental results show that the ratio has a large effect on performance bridge action process film can be clearly observed high-speed photography.

This paper describes insect type micro robots controlled by a CMOS IC of hardware neural networks. The micro robot is fabricated by the micro electro mechanical systems (MEMS) technology using a silicon wafer, and the actuator is composed of artificial muscle wires on the basis of shape memory alloy. Insect-like walking is achieved by link mechanisms that transform the actuator’s rotational mot...

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...