An excimer laser micromachining system is developed to study the process in fabricating high-aspect-ratio microstructures. Specifically, the study experimentally examines process efficiency and the impact of changing major laser operating parameters on the resulting microstructural shapes and morphology. The materials considered in the study include glass, silicon, and aluminum. The ablation or...

The paper describes the multi-objective optimization of hole sinking electrical discharge micromachining (HSEDMM) process considering material removal rate (MRR), tool wear rate (TWR), and hole taper (Ta) as objectives simultaneously. The micromachining parameters considered in the present work are gap voltage and capacitance of capacitor. Eighteen set of experiments are conducted as per L18 or...

We demonstrate an all-fiber-integrated laser based on off-the-shelf components producing square-shaped, 1 ns-long pulses at 1.03 μm wavelength with 3.1 MHz repetition rate and 83 W of average power. The master-oscillator power-amplifier system is seeded by a fiber oscillator utilizing a nonlinear optical loop mirror and producing incompressible pulses. A simple technique is employed to demonstr...

This paper reports the fabrication of a bulk micromachined hybrid torsional micromirror device composed of titanium mirror structures bonded to an underlying silicon sloping electrode structure. The fabrication of the device is enabled by two recent innovations: 1) the Metal Anisotropic Reactive Ion etching with Oxidation (MARIO) Process [1], which provides, for the first time, high aspect rati...

Micromachining is the most basic technology for the production of miniaturized parts and components. Micro turning is one type of micromachining process which uses a solid tool and its material removal process is almost similar to conventional turning operation. The objective of this paper is to provide a state of the art in the field of micro turning. In recent years, researchers have explored...

Micromachining technology opens up many new opportunities for optical and optoelectronic systems. It offers unprecedented capabilities in extending the functionality of optical devices and the miniaturization of optical systems. Movable structures, microactuators, and microoptical elements can be monolithically integrated on the same substrate using batch processing technologies. In this paper,...

Femtosecond laser micromachining of glass material using low-energy, sub-ablation threshold pulses find numerous applications in the fields of integrated optics, lab-on-a-chips and microsystems in general. In this paper, we study the influence of the laser-deposited energy on the performance of the micromachining process. In particular, we show that the energy deposited in the substrate affects...

Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe are employed to characterize the morphology and image measurement of the micro-cantilever arrays, resp...

A new class of silicon-based deformable mirrors is described. These devices are capable of correcting time-varying aberrations in imaging or beam forming applications. Each mirror is composed of a flexible silicon membrane supported by an underlying array of electrostatic parallel plate actuators. All structural and electronic elements were fabricated through conventional surface micromachining...

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...